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- W2012244056 abstract "Backside secondary ion mass spectroscopy is used to examine elemental redistribution in Zn or Cd implanted Pd/Ge contacts to p-InGaAs. A quaternary Pd-In-Ga-As layer is observed at annealing temperatures of 200–250 °C. At temperatures ≳250 °C, this layer disappears due to PdGe formation and InGaAs regrowth. Excess Ge diffuses to the contact interface. Cd and Zn accumulate inside the regrown InGaAs creating a thin, highly doped layer. Due to its abrupt interface and the formation of a highly doped layer beneath the contact, this implanted Pd/Ge contact scheme is a promising candidate for shallow ohmic contacts to p-InGaAs." @default.
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- W2012244056 date "1994-08-29" @default.
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- W2012244056 title "Secondary ion mass spectroscopy study of Zn or Cd implanted and rapid thermally annealed Pd/Ge contacts to<i>p</i>‐In<sub>0.53</sub>Ga<sub>0.47</sub>As" @default.
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- W2012244056 doi "https://doi.org/10.1063/1.112137" @default.
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