Matches in SemOpenAlex for { <https://semopenalex.org/work/W2012257005> ?p ?o ?g. }
Showing items 1 to 92 of
92
with 100 items per page.
- W2012257005 abstract "Abstract Ion implantation is of technological importance in the preparation of doped semiconductors. Raman spectroscopy is a very sensitive and nondestructive tool useful for obtaining information about the state of a material and to distinguish the original crystalline structure and the damaged lattice. In this paper, the variations of the Raman spectra for Si-implanted (100)GaSb with various doses and energies were investigated. In order to heal the damage layer, conventional furnace annealing (FA) as well as rapid thermal annealing (RTA) were used. From these spectra, we found that the quality of the recovered layer will be improved with higher annealing temperatures and longer annealing times. Also, rapid thermal annealing showed better results in comparison with conventional furnace annealing. The best recovery of the damage layer for Si-implanted (1 × 10 15 cm −2 , 150 keV) GaSb was at 600° C for 30 s by rapid thermal annealing." @default.
- W2012257005 created "2016-06-24" @default.
- W2012257005 creator A5040352490 @default.
- W2012257005 creator A5045788665 @default.
- W2012257005 creator A5075543833 @default.
- W2012257005 creator A5078782874 @default.
- W2012257005 date "1991-04-01" @default.
- W2012257005 modified "2023-10-17" @default.
- W2012257005 title "Characterization of Si-implanted gallium antimonide" @default.
- W2012257005 cites W1981860225 @default.
- W2012257005 cites W1998198002 @default.
- W2012257005 cites W1999125428 @default.
- W2012257005 cites W2031989573 @default.
- W2012257005 cites W2061254869 @default.
- W2012257005 cites W2078333779 @default.
- W2012257005 cites W2081217877 @default.
- W2012257005 cites W2093419834 @default.
- W2012257005 doi "https://doi.org/10.1016/0168-583x(91)96282-p" @default.
- W2012257005 hasPublicationYear "1991" @default.
- W2012257005 type Work @default.
- W2012257005 sameAs 2012257005 @default.
- W2012257005 citedByCount "0" @default.
- W2012257005 crossrefType "journal-article" @default.
- W2012257005 hasAuthorship W2012257005A5040352490 @default.
- W2012257005 hasAuthorship W2012257005A5045788665 @default.
- W2012257005 hasAuthorship W2012257005A5075543833 @default.
- W2012257005 hasAuthorship W2012257005A5078782874 @default.
- W2012257005 hasConcept C105382558 @default.
- W2012257005 hasConcept C108225325 @default.
- W2012257005 hasConcept C113196181 @default.
- W2012257005 hasConcept C120665830 @default.
- W2012257005 hasConcept C121332964 @default.
- W2012257005 hasConcept C145148216 @default.
- W2012257005 hasConcept C178790620 @default.
- W2012257005 hasConcept C185592680 @default.
- W2012257005 hasConcept C191897082 @default.
- W2012257005 hasConcept C192562407 @default.
- W2012257005 hasConcept C2777855556 @default.
- W2012257005 hasConcept C2781249499 @default.
- W2012257005 hasConcept C2989315489 @default.
- W2012257005 hasConcept C40003534 @default.
- W2012257005 hasConcept C41823505 @default.
- W2012257005 hasConcept C43617362 @default.
- W2012257005 hasConcept C49040817 @default.
- W2012257005 hasConcept C550372918 @default.
- W2012257005 hasConcept C57863236 @default.
- W2012257005 hasConceptScore W2012257005C105382558 @default.
- W2012257005 hasConceptScore W2012257005C108225325 @default.
- W2012257005 hasConceptScore W2012257005C113196181 @default.
- W2012257005 hasConceptScore W2012257005C120665830 @default.
- W2012257005 hasConceptScore W2012257005C121332964 @default.
- W2012257005 hasConceptScore W2012257005C145148216 @default.
- W2012257005 hasConceptScore W2012257005C178790620 @default.
- W2012257005 hasConceptScore W2012257005C185592680 @default.
- W2012257005 hasConceptScore W2012257005C191897082 @default.
- W2012257005 hasConceptScore W2012257005C192562407 @default.
- W2012257005 hasConceptScore W2012257005C2777855556 @default.
- W2012257005 hasConceptScore W2012257005C2781249499 @default.
- W2012257005 hasConceptScore W2012257005C2989315489 @default.
- W2012257005 hasConceptScore W2012257005C40003534 @default.
- W2012257005 hasConceptScore W2012257005C41823505 @default.
- W2012257005 hasConceptScore W2012257005C43617362 @default.
- W2012257005 hasConceptScore W2012257005C49040817 @default.
- W2012257005 hasConceptScore W2012257005C550372918 @default.
- W2012257005 hasConceptScore W2012257005C57863236 @default.
- W2012257005 hasLocation W20122570051 @default.
- W2012257005 hasOpenAccess W2012257005 @default.
- W2012257005 hasPrimaryLocation W20122570051 @default.
- W2012257005 hasRelatedWork W1524420298 @default.
- W2012257005 hasRelatedWork W1970597855 @default.
- W2012257005 hasRelatedWork W1985454677 @default.
- W2012257005 hasRelatedWork W2008626539 @default.
- W2012257005 hasRelatedWork W2019581425 @default.
- W2012257005 hasRelatedWork W2025029190 @default.
- W2012257005 hasRelatedWork W2033619629 @default.
- W2012257005 hasRelatedWork W2035552895 @default.
- W2012257005 hasRelatedWork W2038966107 @default.
- W2012257005 hasRelatedWork W2049108577 @default.
- W2012257005 hasRelatedWork W2065770698 @default.
- W2012257005 hasRelatedWork W2072471055 @default.
- W2012257005 hasRelatedWork W2076655769 @default.
- W2012257005 hasRelatedWork W2300656305 @default.
- W2012257005 hasRelatedWork W2317941220 @default.
- W2012257005 hasRelatedWork W2318894047 @default.
- W2012257005 hasRelatedWork W2322593700 @default.
- W2012257005 hasRelatedWork W2532961477 @default.
- W2012257005 hasRelatedWork W2534359074 @default.
- W2012257005 hasRelatedWork W2964276091 @default.
- W2012257005 isParatext "false" @default.
- W2012257005 isRetracted "false" @default.
- W2012257005 magId "2012257005" @default.
- W2012257005 workType "article" @default.