Matches in SemOpenAlex for { <https://semopenalex.org/work/W2012302689> ?p ?o ?g. }
- W2012302689 endingPage "524" @default.
- W2012302689 startingPage "517" @default.
- W2012302689 abstract "The morphological evolution on Si (1 0 0) surface for grazing incidence (75°) and low energy (500 eV) Ar+ sputtering is studied at various ion fluences. The ion induced surface topography was characterized by atomic force microscopy. Initially ion sputtering generates irregular dot-like structure on the surface. These dots begin to elongate along the ion beam direction with the increase of sputtering time and then transform to needle shaped structure at the late stage of sputtering. The morphological data are quantitatively analyzed within the framework of the dynamic scaling theory. Estimated scaling exponents do not follow the conventional Family–Vicsek relation rather exhibit typical anomalous scaling. A crossover in scaling behaviour of local surface width is observed at fluence 1.5 × 1018 cm−2, above which the eroded surface shows super-rough scaling behaviour along the axis of the conical structures with global exponents αs = α = 1.6 ± 0.1, β = 0.99 ± 0.03 and local exponents αlocal = 1 and βlocal = 0.63 ± 0.05. The importance of nonlocal ion reflection effects for the development of super-rough scaling is discussed." @default.
- W2012302689 created "2016-06-24" @default.
- W2012302689 creator A5050045034 @default.
- W2012302689 creator A5082275937 @default.
- W2012302689 date "2015-01-01" @default.
- W2012302689 modified "2023-09-23" @default.
- W2012302689 title "Super-roughening scaling behaviour of Si surface morphology at grazing incidence low energy ion beam sputtering" @default.
- W2012302689 cites W1979545045 @default.
- W2012302689 cites W1986607697 @default.
- W2012302689 cites W1996031406 @default.
- W2012302689 cites W1999476632 @default.
- W2012302689 cites W2000835246 @default.
- W2012302689 cites W2002673307 @default.
- W2012302689 cites W2003128114 @default.
- W2012302689 cites W2012386172 @default.
- W2012302689 cites W2040184453 @default.
- W2012302689 cites W2043257643 @default.
- W2012302689 cites W2043722452 @default.
- W2012302689 cites W2047205370 @default.
- W2012302689 cites W2050157962 @default.
- W2012302689 cites W2050957111 @default.
- W2012302689 cites W2060337669 @default.
- W2012302689 cites W2060463171 @default.
- W2012302689 cites W2061341776 @default.
- W2012302689 cites W2070591607 @default.
- W2012302689 cites W2073846544 @default.
- W2012302689 cites W2073855183 @default.
- W2012302689 cites W2074431908 @default.
- W2012302689 cites W2076222749 @default.
- W2012302689 cites W2085725634 @default.
- W2012302689 cites W2089235007 @default.
- W2012302689 cites W2091580493 @default.
- W2012302689 cites W2092360241 @default.
- W2012302689 cites W2104946322 @default.
- W2012302689 cites W2112948696 @default.
- W2012302689 cites W2114964654 @default.
- W2012302689 cites W2115772502 @default.
- W2012302689 cites W2126461448 @default.
- W2012302689 cites W2140840000 @default.
- W2012302689 cites W2144195730 @default.
- W2012302689 cites W2163972733 @default.
- W2012302689 cites W2314902949 @default.
- W2012302689 cites W2327925688 @default.
- W2012302689 doi "https://doi.org/10.1016/j.apsusc.2014.07.209" @default.
- W2012302689 hasPublicationYear "2015" @default.
- W2012302689 type Work @default.
- W2012302689 sameAs 2012302689 @default.
- W2012302689 citedByCount "14" @default.
- W2012302689 countsByYear W20123026892016 @default.
- W2012302689 countsByYear W20123026892017 @default.
- W2012302689 countsByYear W20123026892018 @default.
- W2012302689 countsByYear W20123026892019 @default.
- W2012302689 countsByYear W20123026892020 @default.
- W2012302689 countsByYear W20123026892021 @default.
- W2012302689 countsByYear W20123026892022 @default.
- W2012302689 crossrefType "journal-article" @default.
- W2012302689 hasAuthorship W2012302689A5050045034 @default.
- W2012302689 hasAuthorship W2012302689A5082275937 @default.
- W2012302689 hasConcept C120665830 @default.
- W2012302689 hasConcept C121332964 @default.
- W2012302689 hasConcept C135402231 @default.
- W2012302689 hasConcept C145148216 @default.
- W2012302689 hasConcept C168834538 @default.
- W2012302689 hasConcept C171250308 @default.
- W2012302689 hasConcept C178790620 @default.
- W2012302689 hasConcept C184779094 @default.
- W2012302689 hasConcept C185592680 @default.
- W2012302689 hasConcept C19067145 @default.
- W2012302689 hasConcept C192562407 @default.
- W2012302689 hasConcept C199360897 @default.
- W2012302689 hasConcept C22078206 @default.
- W2012302689 hasConcept C22423302 @default.
- W2012302689 hasConcept C2524010 @default.
- W2012302689 hasConcept C33923547 @default.
- W2012302689 hasConcept C41008148 @default.
- W2012302689 hasConcept C41999313 @default.
- W2012302689 hasConcept C50774322 @default.
- W2012302689 hasConcept C65682993 @default.
- W2012302689 hasConcept C97355855 @default.
- W2012302689 hasConcept C99844830 @default.
- W2012302689 hasConceptScore W2012302689C120665830 @default.
- W2012302689 hasConceptScore W2012302689C121332964 @default.
- W2012302689 hasConceptScore W2012302689C135402231 @default.
- W2012302689 hasConceptScore W2012302689C145148216 @default.
- W2012302689 hasConceptScore W2012302689C168834538 @default.
- W2012302689 hasConceptScore W2012302689C171250308 @default.
- W2012302689 hasConceptScore W2012302689C178790620 @default.
- W2012302689 hasConceptScore W2012302689C184779094 @default.
- W2012302689 hasConceptScore W2012302689C185592680 @default.
- W2012302689 hasConceptScore W2012302689C19067145 @default.
- W2012302689 hasConceptScore W2012302689C192562407 @default.
- W2012302689 hasConceptScore W2012302689C199360897 @default.
- W2012302689 hasConceptScore W2012302689C22078206 @default.
- W2012302689 hasConceptScore W2012302689C22423302 @default.
- W2012302689 hasConceptScore W2012302689C2524010 @default.
- W2012302689 hasConceptScore W2012302689C33923547 @default.
- W2012302689 hasConceptScore W2012302689C41008148 @default.
- W2012302689 hasConceptScore W2012302689C41999313 @default.