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• W2012304092 abstract "In this paper, we fabricated and evaluated a flowmeter with a sub-micron sized piezoresistive layer for the measurement in the small area. For the small area detection, the sensing material should be reduced as well as sensor body. We use the FIB system to reduce the size of the sensing material and obtain the sub-micron sized line width. The device is fabricated with the standard MEMS process, and the platinum layer is selected as the piezoresistive material considering the electrical conductivity. The 0∼4m/s air flows are applied to the flowmeter and the experimental results shows the negative sensitivity output with -3.22E−5/ms−1. This negative value is due to the additional materials like carbon and gallium. The various experiments including stability and repeatability are performed, and the repeated operation shows stable output signals with less than 9.6% variation. Through those experiment results, the FIB assisted platinum layer is suitable for the piezoresistive detection and a flowmeter can be a..." @default.
• W2012304092 created "2016-06-24" @default.
• W2012304092 creator A5019886336 @default.
• W2012304092 creator A5064323125 @default.
• W2012304092 date "2014-06-16" @default.
• W2012304092 modified "2023-09-23" @default.
• W2012304092 title "A Flowmeter with Piezoresistive Metal Layer Deposited with Focused-Ion-Beam System" @default.
• W2012304092 cites W1975183872 @default.
• W2012304092 cites W2001563140 @default.
• W2012304092 cites W2023344550 @default.
• W2012304092 cites W2025141314 @default.
• W2012304092 cites W2030551498 @default.
• W2012304092 cites W2035101019 @default.
• W2012304092 cites W2037850808 @default.
• W2012304092 cites W2047089651 @default.
• W2012304092 cites W2051793518 @default.
• W2012304092 cites W2056937792 @default.
• W2012304092 cites W2062890507 @default.
• W2012304092 cites W2076358343 @default.
• W2012304092 cites W2094738284 @default.
• W2012304092 cites W2098970723 @default.
• W2012304092 cites W2133864957 @default.
• W2012304092 cites W2144500335 @default.
• W2012304092 cites W2151802035 @default.
• W2012304092 cites W2160686186 @default.
• W2012304092 cites W2175868557 @default.
• W2012304092 doi "https://doi.org/10.1080/10584587.2014.912910" @default.
• W2012304092 hasPublicationYear "2014" @default.
• W2012304092 type Work @default.
• W2012304092 sameAs 2012304092 @default.
• W2012304092 citedByCount "0" @default.
• W2012304092 crossrefType "journal-article" @default.
• W2012304092 hasAuthorship W2012304092A5019886336 @default.
• W2012304092 hasAuthorship W2012304092A5064323125 @default.
• W2012304092 hasConcept C121332964 @default.
• W2012304092 hasConcept C127413603 @default.
• W2012304092 hasConcept C131540310 @default.
• W2012304092 hasConcept C145148216 @default.
• W2012304092 hasConcept C147789679 @default.
• W2012304092 hasConcept C154020017 @default.
• W2012304092 hasConcept C159985019 @default.
• W2012304092 hasConcept C161866238 @default.
• W2012304092 hasConcept C171250308 @default.
• W2012304092 hasConcept C185592680 @default.
• W2012304092 hasConcept C191897082 @default.
• W2012304092 hasConcept C192562407 @default.
• W2012304092 hasConcept C198490522 @default.
• W2012304092 hasConcept C21200559 @default.
• W2012304092 hasConcept C24326235 @default.
• W2012304092 hasConcept C2779227376 @default.
• W2012304092 hasConcept C37977207 @default.
• W2012304092 hasConcept C43617362 @default.
• W2012304092 hasConcept C49040817 @default.
• W2012304092 hasConcept C550372918 @default.
• W2012304092 hasConcept C62520636 @default.
• W2012304092 hasConceptScore W2012304092C121332964 @default.
• W2012304092 hasConceptScore W2012304092C127413603 @default.
• W2012304092 hasConceptScore W2012304092C131540310 @default.
• W2012304092 hasConceptScore W2012304092C145148216 @default.
• W2012304092 hasConceptScore W2012304092C147789679 @default.
• W2012304092 hasConceptScore W2012304092C154020017 @default.
• W2012304092 hasConceptScore W2012304092C159985019 @default.
• W2012304092 hasConceptScore W2012304092C161866238 @default.
• W2012304092 hasConceptScore W2012304092C171250308 @default.
• W2012304092 hasConceptScore W2012304092C185592680 @default.
• W2012304092 hasConceptScore W2012304092C191897082 @default.
• W2012304092 hasConceptScore W2012304092C192562407 @default.
• W2012304092 hasConceptScore W2012304092C198490522 @default.
• W2012304092 hasConceptScore W2012304092C21200559 @default.
• W2012304092 hasConceptScore W2012304092C24326235 @default.
• W2012304092 hasConceptScore W2012304092C2779227376 @default.
• W2012304092 hasConceptScore W2012304092C37977207 @default.
• W2012304092 hasConceptScore W2012304092C43617362 @default.
• W2012304092 hasConceptScore W2012304092C49040817 @default.
• W2012304092 hasConceptScore W2012304092C550372918 @default.
• W2012304092 hasConceptScore W2012304092C62520636 @default.
• W2012304092 hasLocation W20123040921 @default.
• W2012304092 hasOpenAccess W2012304092 @default.
• W2012304092 hasPrimaryLocation W20123040921 @default.
• W2012304092 hasRelatedWork W1509554789 @default.
• W2012304092 hasRelatedWork W1973711110 @default.
• W2012304092 hasRelatedWork W1984648823 @default.
• W2012304092 hasRelatedWork W1987031878 @default.
• W2012304092 hasRelatedWork W1990895680 @default.
• W2012304092 hasRelatedWork W2037923542 @default.
• W2012304092 hasRelatedWork W2039183883 @default.
• W2012304092 hasRelatedWork W2046758559 @default.
• W2012304092 hasRelatedWork W2073904802 @default.
• W2012304092 hasRelatedWork W2103191160 @default.
• W2012304092 hasRelatedWork W2105186384 @default.
• W2012304092 hasRelatedWork W2141362856 @default.
• W2012304092 hasRelatedWork W2145866834 @default.
• W2012304092 hasRelatedWork W2164327148 @default.
• W2012304092 hasRelatedWork W2212116088 @default.
• W2012304092 hasRelatedWork W2292963149 @default.
• W2012304092 hasRelatedWork W2350512080 @default.
• W2012304092 hasRelatedWork W2779655032 @default.
• W2012304092 hasRelatedWork W2900901087 @default.
• W2012304092 hasRelatedWork W2865762240 @default.
• W2012304092 isParatext "false" @default.

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