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- W2012310106 abstract "Description of the fabrication and characteristics of a micromachined metal thin-film pressure sensor for working at high temperatures is presented. The proposed pressure sensor consists of a Cr thin-film, patterned on a Wheatstone bridge configuration, sputter-deposited onto thermally oxidised Si membranes with an Al interconnection layer. This sensor has the advantages of high sensitivity, high temperature operation and is suitable for batch process." @default.
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- W2012310106 date "2002-01-01" @default.
- W2012310106 modified "2023-10-18" @default.
- W2012310106 title "Micromachined metal thin-film pressure sensor suitable for batch process" @default.
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- W2012310106 doi "https://doi.org/10.1049/el:20020933" @default.
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