Matches in SemOpenAlex for { <https://semopenalex.org/work/W2012324281> ?p ?o ?g. }
Showing items 1 to 63 of
63
with 100 items per page.
- W2012324281 endingPage "1646" @default.
- W2012324281 startingPage "1646" @default.
- W2012324281 abstract "An interference profilometer for measuring the microprofile of superfine surfaces is described. It has a stabilized He-Ne laser light source with two longitudinal modes and two coaxial interference arms. The measuring arm is focused on the sample surface to form a small spot while the reference arm forms a large spot. As a result, the refer- ence arm provides a constant signal and only the measuring arm will be sensitive to the irregularity of the microprofile. Mechanical vibration has a very small effect on the instrument performance. Even if vibration ampli- tudes reach 300 nm, the measurement noise is less than 1 nm. The instrument has a vertical resolution better than 0.2 A root mean square (rms) and smallest form error among existing coaxial profilometers. It is well suited for measuring the microstructure on photoetched surfaces. © 2001 Society of Photo-Optical Instrumentation Engineers. (DOI: 10.1117/1.1387994)" @default.
- W2012324281 created "2016-06-24" @default.
- W2012324281 creator A5035701638 @default.
- W2012324281 creator A5055003522 @default.
- W2012324281 creator A5055283229 @default.
- W2012324281 creator A5056630426 @default.
- W2012324281 date "2001-08-01" @default.
- W2012324281 modified "2023-10-17" @default.
- W2012324281 title "Profilometer for measuring superfine surfaces" @default.
- W2012324281 cites W1992984362 @default.
- W2012324281 cites W2016163522 @default.
- W2012324281 cites W2054551542 @default.
- W2012324281 cites W2103946814 @default.
- W2012324281 cites W2134817912 @default.
- W2012324281 cites W2144172558 @default.
- W2012324281 doi "https://doi.org/10.1117/1.1387994" @default.
- W2012324281 hasPublicationYear "2001" @default.
- W2012324281 type Work @default.
- W2012324281 sameAs 2012324281 @default.
- W2012324281 citedByCount "6" @default.
- W2012324281 countsByYear W20123242812013 @default.
- W2012324281 crossrefType "journal-article" @default.
- W2012324281 hasAuthorship W2012324281A5035701638 @default.
- W2012324281 hasAuthorship W2012324281A5055003522 @default.
- W2012324281 hasAuthorship W2012324281A5055283229 @default.
- W2012324281 hasAuthorship W2012324281A5056630426 @default.
- W2012324281 hasConcept C120665830 @default.
- W2012324281 hasConcept C121332964 @default.
- W2012324281 hasConcept C121684516 @default.
- W2012324281 hasConcept C159985019 @default.
- W2012324281 hasConcept C192562407 @default.
- W2012324281 hasConcept C41008148 @default.
- W2012324281 hasConcept C71039073 @default.
- W2012324281 hasConcept C79261456 @default.
- W2012324281 hasConceptScore W2012324281C120665830 @default.
- W2012324281 hasConceptScore W2012324281C121332964 @default.
- W2012324281 hasConceptScore W2012324281C121684516 @default.
- W2012324281 hasConceptScore W2012324281C159985019 @default.
- W2012324281 hasConceptScore W2012324281C192562407 @default.
- W2012324281 hasConceptScore W2012324281C41008148 @default.
- W2012324281 hasConceptScore W2012324281C71039073 @default.
- W2012324281 hasConceptScore W2012324281C79261456 @default.
- W2012324281 hasIssue "8" @default.
- W2012324281 hasLocation W20123242811 @default.
- W2012324281 hasOpenAccess W2012324281 @default.
- W2012324281 hasPrimaryLocation W20123242811 @default.
- W2012324281 hasRelatedWork W2008392206 @default.
- W2012324281 hasRelatedWork W2014892848 @default.
- W2012324281 hasRelatedWork W2034815839 @default.
- W2012324281 hasRelatedWork W2054218586 @default.
- W2012324281 hasRelatedWork W2094421267 @default.
- W2012324281 hasRelatedWork W2170598476 @default.
- W2012324281 hasRelatedWork W2899084033 @default.
- W2012324281 hasRelatedWork W2916359837 @default.
- W2012324281 hasRelatedWork W3140324014 @default.
- W2012324281 hasRelatedWork W4321273799 @default.
- W2012324281 hasVolume "40" @default.
- W2012324281 isParatext "false" @default.
- W2012324281 isRetracted "false" @default.
- W2012324281 magId "2012324281" @default.
- W2012324281 workType "article" @default.