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- W2012326385 abstract "Effects of background gas (N 2 or SF 6 ) on ripple formation by oblique incidence gas cluster ion beam (GCIB) irradiation were investigated. When N 2 gas was introduced as background gas, both ripple structures and the sputtering yield of Si and SiO 2 did not change by Ar-GCIB irradiation at 60° incidence. However, wavelength of ripple became larger when SF 6 gas was introduced as background gas. Increase of the sputtering yield in SF 6 environment correlates with the change of ripple structures. It is assumed that SF 6 molecules adsorbed on ripple structures, and Si or SiO 2 ripples were etched preferentially." @default.
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- W2012326385 date "2014-03-28" @default.
- W2012326385 modified "2023-09-26" @default.
- W2012326385 title "Ripple formations by gas cluster ion irradiation in reactive gas environments" @default.
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- W2012326385 doi "https://doi.org/10.7567/jjap.53.05fc01" @default.
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