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- W2012501546 abstract "The reliability of nanometer track writing in the large scale chip manufacturing process depends mainly on a precise positioning of the e-beam writer moving stage. The laser interferometers are usually employed to control this positioning, but their complicated optical scheme leads to an expensive instrument which increases the e-beam writer's manufacturing costs. We present a new design of an interferometric system useful in a currently developed cost effective e-beam writers. Our approach simplifies the optical scheme of known industrial interferometers and shifts the interference phase detection complexity from optical domain to the digital signal processing part. Besides the effective cost, the low number of optical components minimizes the total uncertainty of this measuring instrument. The scheme consists of a single wavelength DFB laser working at 1530 nm, one beam splitter, measuring and reference reflectors and one photo-detector at the interferometer output. The DFB laser is frequency modulated by slight changes of injection current while the interference intensity signal is processed synchronously. Our algorithm quantifies the phase as two sinusoidal waveforms with a phase offset equal to the quarter of the DFB laser wavelength. Besides the computation of these quadrature signals, the scale linearization techniques are used for an additional suppression of optical setup imperfections, noise and the residual amplitude modulation caused by the laser modulation. The stage position is calculated on basis of the DFB laser wavelength and the processed interference phase. To validate the precision and accuracy we have carried out a pilot experimental comparison with a reference interferometer over the 100 mm measurement range. The first tests promise only ±2 nm deviation between simplified and the reference interferometer." @default.
- W2012501546 created "2016-06-24" @default.
- W2012501546 creator A5009207768 @default.
- W2012501546 creator A5012746388 @default.
- W2012501546 creator A5030129973 @default.
- W2012501546 creator A5056560467 @default.
- W2012501546 creator A5059861021 @default.
- W2012501546 creator A5061975927 @default.
- W2012501546 date "2014-03-08" @default.
- W2012501546 modified "2023-09-23" @default.
- W2012501546 title "Interferometric measurement system for cost effective e-beam writer" @default.
- W2012501546 cites W1969099310 @default.
- W2012501546 cites W1969806047 @default.
- W2012501546 cites W1973972625 @default.
- W2012501546 cites W2006100335 @default.
- W2012501546 cites W2018018509 @default.
- W2012501546 cites W2018279380 @default.
- W2012501546 cites W2022510071 @default.
- W2012501546 cites W2027146965 @default.
- W2012501546 cites W2038869889 @default.
- W2012501546 cites W2049627622 @default.
- W2012501546 cites W2080371229 @default.
- W2012501546 cites W2080703547 @default.
- W2012501546 cites W2111845465 @default.
- W2012501546 cites W2124463371 @default.
- W2012501546 cites W2326407847 @default.
- W2012501546 doi "https://doi.org/10.1117/12.2054803" @default.
- W2012501546 hasPublicationYear "2014" @default.
- W2012501546 type Work @default.
- W2012501546 sameAs 2012501546 @default.
- W2012501546 citedByCount "1" @default.
- W2012501546 countsByYear W20125015462014 @default.
- W2012501546 crossrefType "proceedings-article" @default.
- W2012501546 hasAuthorship W2012501546A5009207768 @default.
- W2012501546 hasAuthorship W2012501546A5012746388 @default.
- W2012501546 hasAuthorship W2012501546A5030129973 @default.
- W2012501546 hasAuthorship W2012501546A5056560467 @default.
- W2012501546 hasAuthorship W2012501546A5059861021 @default.
- W2012501546 hasAuthorship W2012501546A5061975927 @default.
- W2012501546 hasConcept C120665830 @default.
- W2012501546 hasConcept C121332964 @default.
- W2012501546 hasConcept C127162648 @default.
- W2012501546 hasConcept C166689943 @default.
- W2012501546 hasConcept C19819980 @default.
- W2012501546 hasConcept C23576306 @default.
- W2012501546 hasConcept C32022120 @default.
- W2012501546 hasConcept C41008148 @default.
- W2012501546 hasConcept C520434653 @default.
- W2012501546 hasConcept C76155785 @default.
- W2012501546 hasConcept C927094 @default.
- W2012501546 hasConcept C94915269 @default.
- W2012501546 hasConceptScore W2012501546C120665830 @default.
- W2012501546 hasConceptScore W2012501546C121332964 @default.
- W2012501546 hasConceptScore W2012501546C127162648 @default.
- W2012501546 hasConceptScore W2012501546C166689943 @default.
- W2012501546 hasConceptScore W2012501546C19819980 @default.
- W2012501546 hasConceptScore W2012501546C23576306 @default.
- W2012501546 hasConceptScore W2012501546C32022120 @default.
- W2012501546 hasConceptScore W2012501546C41008148 @default.
- W2012501546 hasConceptScore W2012501546C520434653 @default.
- W2012501546 hasConceptScore W2012501546C76155785 @default.
- W2012501546 hasConceptScore W2012501546C927094 @default.
- W2012501546 hasConceptScore W2012501546C94915269 @default.
- W2012501546 hasLocation W20125015461 @default.
- W2012501546 hasOpenAccess W2012501546 @default.
- W2012501546 hasPrimaryLocation W20125015461 @default.
- W2012501546 hasRelatedWork W1980336105 @default.
- W2012501546 hasRelatedWork W1998425486 @default.
- W2012501546 hasRelatedWork W2009198496 @default.
- W2012501546 hasRelatedWork W2027898010 @default.
- W2012501546 hasRelatedWork W2050158369 @default.
- W2012501546 hasRelatedWork W2061161732 @default.
- W2012501546 hasRelatedWork W2062660014 @default.
- W2012501546 hasRelatedWork W2076403196 @default.
- W2012501546 hasRelatedWork W2486448268 @default.
- W2012501546 hasRelatedWork W2744028589 @default.
- W2012501546 isParatext "false" @default.
- W2012501546 isRetracted "false" @default.
- W2012501546 magId "2012501546" @default.
- W2012501546 workType "article" @default.