FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2012506275> ?p ?o ?g. }

• W2012506275 endingPage "177" @default.
• W2012506275 startingPage "173" @default.
• W2012506275 abstract "Atom probe tomography was used to study the redistribution of platinum during Ni(10 at.%Pt) silicidation of n-doped polycrystalline Si. These measurements were performed after the two annealing steps of standard salicide process both on a field-effect transistor and on unpatterned region submitted to the same process. Very similar results are obtained in unpatterned region and in transistor gate contact. The first phase to form is not the expected δ-Ni2Si but the non stoichiometric θ-Ni2Si. Pt redistribution is strongly influenced by this phase and the final distribution is different from what is reported in literature." @default.
• W2012506275 created "2016-06-24" @default.
• W2012506275 creator A5000082795 @default.
• W2012506275 creator A5024940340 @default.
• W2012506275 creator A5034108347 @default.
• W2012506275 creator A5056844246 @default.
• W2012506275 creator A5056861244 @default.
• W2012506275 date "2013-07-01" @default.
• W2012506275 modified "2023-10-18" @default.
• W2012506275 title "Pt redistribution in N-MOS transistors during Ni salicide process" @default.
• W2012506275 cites W1963752462 @default.
• W2012506275 cites W1969577147 @default.
• W2012506275 cites W1973466422 @default.
• W2012506275 cites W1977338420 @default.
• W2012506275 cites W1979504098 @default.
• W2012506275 cites W1983686945 @default.
• W2012506275 cites W1989698669 @default.
• W2012506275 cites W1999804748 @default.
• W2012506275 cites W2019855812 @default.
• W2012506275 cites W2019942105 @default.
• W2012506275 cites W2020447401 @default.
• W2012506275 cites W2025679171 @default.
• W2012506275 cites W2031131370 @default.
• W2012506275 cites W2037478810 @default.
• W2012506275 cites W2042046341 @default.
• W2012506275 cites W2061708479 @default.
• W2012506275 cites W2062125764 @default.
• W2012506275 cites W2072961491 @default.
• W2012506275 cites W2076048220 @default.
• W2012506275 cites W2076358032 @default.
• W2012506275 cites W2076993068 @default.
• W2012506275 cites W2094866327 @default.
• W2012506275 cites W3022476158 @default.
• W2012506275 doi "https://doi.org/10.1016/j.mee.2013.01.029" @default.
• W2012506275 hasPublicationYear "2013" @default.
• W2012506275 type Work @default.
• W2012506275 sameAs 2012506275 @default.
• W2012506275 citedByCount "15" @default.
• W2012506275 countsByYear W20125062752014 @default.
• W2012506275 countsByYear W20125062752016 @default.
• W2012506275 countsByYear W20125062752017 @default.
• W2012506275 countsByYear W20125062752018 @default.
• W2012506275 countsByYear W20125062752020 @default.
• W2012506275 countsByYear W20125062752023 @default.
• W2012506275 crossrefType "journal-article" @default.
• W2012506275 hasAuthorship W2012506275A5000082795 @default.
• W2012506275 hasAuthorship W2012506275A5024940340 @default.
• W2012506275 hasAuthorship W2012506275A5034108347 @default.
• W2012506275 hasAuthorship W2012506275A5056844246 @default.
• W2012506275 hasAuthorship W2012506275A5056861244 @default.
• W2012506275 hasConcept C113196181 @default.
• W2012506275 hasConcept C119599485 @default.
• W2012506275 hasConcept C127413603 @default.
• W2012506275 hasConcept C137637335 @default.
• W2012506275 hasConcept C144082473 @default.
• W2012506275 hasConcept C147789679 @default.
• W2012506275 hasConcept C161790260 @default.
• W2012506275 hasConcept C165801399 @default.
• W2012506275 hasConcept C16876290 @default.
• W2012506275 hasConcept C171250308 @default.
• W2012506275 hasConcept C172385210 @default.
• W2012506275 hasConcept C173118649 @default.
• W2012506275 hasConcept C17744445 @default.
• W2012506275 hasConcept C185592680 @default.
• W2012506275 hasConcept C191897082 @default.
• W2012506275 hasConcept C192562407 @default.
• W2012506275 hasConcept C199539241 @default.
• W2012506275 hasConcept C2777855556 @default.
• W2012506275 hasConcept C2779227376 @default.
• W2012506275 hasConcept C2780901251 @default.
• W2012506275 hasConcept C43617362 @default.
• W2012506275 hasConcept C49040817 @default.
• W2012506275 hasConcept C518104683 @default.
• W2012506275 hasConcept C544956773 @default.
• W2012506275 hasConcept C55493867 @default.
• W2012506275 hasConcept C57863236 @default.
• W2012506275 hasConcept C74080474 @default.
• W2012506275 hasConcept C87359718 @default.
• W2012506275 hasConcept C87976508 @default.
• W2012506275 hasConcept C94625758 @default.
• W2012506275 hasConceptScore W2012506275C113196181 @default.
• W2012506275 hasConceptScore W2012506275C119599485 @default.
• W2012506275 hasConceptScore W2012506275C127413603 @default.
• W2012506275 hasConceptScore W2012506275C137637335 @default.
• W2012506275 hasConceptScore W2012506275C144082473 @default.
• W2012506275 hasConceptScore W2012506275C147789679 @default.
• W2012506275 hasConceptScore W2012506275C161790260 @default.
• W2012506275 hasConceptScore W2012506275C165801399 @default.
• W2012506275 hasConceptScore W2012506275C16876290 @default.
• W2012506275 hasConceptScore W2012506275C171250308 @default.
• W2012506275 hasConceptScore W2012506275C172385210 @default.
• W2012506275 hasConceptScore W2012506275C173118649 @default.
• W2012506275 hasConceptScore W2012506275C17744445 @default.
• W2012506275 hasConceptScore W2012506275C185592680 @default.
• W2012506275 hasConceptScore W2012506275C191897082 @default.
• W2012506275 hasConceptScore W2012506275C192562407 @default.
• W2012506275 hasConceptScore W2012506275C199539241 @default.
• W2012506275 hasConceptScore W2012506275C2777855556 @default.

• next