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- W2012524001 abstract "Factors controlling the synthesis of layers of high density and uniform thickness on tube-shaped substrates are analysed in this paper. Relationships describing the growth rate on these substrates have been given. They take into account the dynamics of change in the flow parameters of gases in the chemical vapour deposition reactor. The growth of amorphous Si3N4 layers, synthesized from SH4 and NH3 on the inner surfaces of quartz tubes of various roughness and constant or varied cross-sections along their axes, was used to test practically the effect of the extended Grx/Rex2 ratio on the growth and the validity of the relationships describing the growth rate. It has also been found that the centrifugal force exerted on the reaction mixture during the synthesis of the layer can affect the resultant mass stream supplied to the substrate." @default.
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- W2012524001 date "1991-10-01" @default.
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- W2012524001 title "Uniform thin chemically vapour deposited layers of high density on the inner surfaces of tube-shaped substrates" @default.
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- W2012524001 doi "https://doi.org/10.1016/0040-6090(91)90072-6" @default.
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