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- W2012628092 abstract "It is proposed and numerically verified that the one-dimensional edge roughness of test sample can be characterized by far-field irradiance measurement at subwavelength-scale precision with a constructed aperture playing as an optical ruler. The precision of the proposed scheme of measurement could be better than 3%, even when the edge roughness is in subwavelength-scale. The influence of sample thickness on the proposed measurement scheme is also investigated and considered." @default.
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- W2012628092 date "2008-04-01" @default.
- W2012628092 modified "2023-09-26" @default.
- W2012628092 title "Characterization of one-dimension edge roughness from far-field irradiance at subwavelength-scale precision" @default.
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- W2012628092 doi "https://doi.org/10.1016/j.optcom.2007.12.032" @default.
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