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- W2012759131 abstract "Abstract The precision of the raster scan motion of piezoelectric tube scanners, e.g. in scanning probe microscopy, is degraded by structural vibrations excited by the driving voltage signals. In order to eliminate these vibrations, a model–based, flatness–based feedforward control scheme is proposed that tracks the tip of the piezoelectric tube along the desired scan trajectory in the lateral plane. This scheme is derived from a modal analysis of the tube scanner dynamics which is obtained by finite element (FE) discretization. In order to achieve robustness of the trajectory tracking performance with respect to model errors or unknown external disturbances, the feedforward control is supplemented by a feedback controller in a two–degree–of–freedom design which feeds back the measured displacements at the top of the scanner. The feedback additionally compensates for the coupling between the two scanning directions, e.g. due to tube eccentricity. The control performance is investigated in simulations where the sample mass attached to the top of the tube, which represents the most realistic model error, is varied. Various simulation results demonstrate the achieved improvements in tracking accuracy by the proposed control over conventional approaches." @default.
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- W2012759131 date "2008-01-01" @default.
- W2012759131 modified "2023-09-25" @default.
- W2012759131 title "Two-Degree-of-Freedom Tracking Control of Piezoelectric Tube Scanners in Two-Dimensional Scanning Applications" @default.
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- W2012759131 doi "https://doi.org/10.3182/20080706-5-kr-1001.01396" @default.
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