Matches in SemOpenAlex for { <https://semopenalex.org/work/W2012806708> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W2012806708 abstract "Defects of the multi-layer (ML) mirror on a EUV reticle, so-called ML-defects, are a prime aspect why EUV mask defectivity is considered a challenge before EUV lithography can be used for the production of future node integrated circuits. The present paper addresses the possibility to mitigate the printability of these defects by repair. Repair of natural EUV mask defects is performed using the electron beam based Carl Zeiss MeRiT® repair technology and is evaluated by wafer printing on the ASML EUV Alpha Demo Tool (ADT) installed at IMEC. Both absorber defects and ML-defects are included. The success of absorber defect repair (both opaque and clear type) is illustrated. For compensation repair of ML-defects experimental proof of the technique is reported, with very encouraging results both for natural pits and bumps. In addition, simulation is used to investigate the limitations of such compensation repair, inspired by the residual printability found experimentally. As an example it was identified that alignment of the compensation repair shape with the ML-defect position requires sub-20nm accuracy. The integration of an Atomic Force Microscope (AFM) into the repair tool has been an important asset to cope with this." @default.
- W2012806708 created "2016-06-24" @default.
- W2012806708 creator A5016861744 @default.
- W2012806708 creator A5023378717 @default.
- W2012806708 creator A5047810108 @default.
- W2012806708 creator A5053842330 @default.
- W2012806708 creator A5066491843 @default.
- W2012806708 creator A5076793369 @default.
- W2012806708 date "2011-10-06" @default.
- W2012806708 modified "2023-10-03" @default.
- W2012806708 title "Repair of natural EUV reticle defects" @default.
- W2012806708 doi "https://doi.org/10.1117/12.898864" @default.
- W2012806708 hasPublicationYear "2011" @default.
- W2012806708 type Work @default.
- W2012806708 sameAs 2012806708 @default.
- W2012806708 citedByCount "28" @default.
- W2012806708 countsByYear W20128067082012 @default.
- W2012806708 countsByYear W20128067082013 @default.
- W2012806708 countsByYear W20128067082014 @default.
- W2012806708 countsByYear W20128067082015 @default.
- W2012806708 countsByYear W20128067082018 @default.
- W2012806708 crossrefType "proceedings-article" @default.
- W2012806708 hasAuthorship W2012806708A5016861744 @default.
- W2012806708 hasAuthorship W2012806708A5023378717 @default.
- W2012806708 hasAuthorship W2012806708A5047810108 @default.
- W2012806708 hasAuthorship W2012806708A5053842330 @default.
- W2012806708 hasAuthorship W2012806708A5066491843 @default.
- W2012806708 hasAuthorship W2012806708A5076793369 @default.
- W2012806708 hasConcept C11171543 @default.
- W2012806708 hasConcept C120665830 @default.
- W2012806708 hasConcept C121332964 @default.
- W2012806708 hasConcept C142362112 @default.
- W2012806708 hasConcept C146617872 @default.
- W2012806708 hasConcept C14737013 @default.
- W2012806708 hasConcept C153349607 @default.
- W2012806708 hasConcept C15744967 @default.
- W2012806708 hasConcept C160671074 @default.
- W2012806708 hasConcept C162996421 @default.
- W2012806708 hasConcept C171250308 @default.
- W2012806708 hasConcept C192562407 @default.
- W2012806708 hasConcept C204223013 @default.
- W2012806708 hasConcept C2777767291 @default.
- W2012806708 hasConcept C2779227376 @default.
- W2012806708 hasConcept C2780023022 @default.
- W2012806708 hasConcept C41008148 @default.
- W2012806708 hasConcept C49040817 @default.
- W2012806708 hasConcept C53524968 @default.
- W2012806708 hasConceptScore W2012806708C11171543 @default.
- W2012806708 hasConceptScore W2012806708C120665830 @default.
- W2012806708 hasConceptScore W2012806708C121332964 @default.
- W2012806708 hasConceptScore W2012806708C142362112 @default.
- W2012806708 hasConceptScore W2012806708C146617872 @default.
- W2012806708 hasConceptScore W2012806708C14737013 @default.
- W2012806708 hasConceptScore W2012806708C153349607 @default.
- W2012806708 hasConceptScore W2012806708C15744967 @default.
- W2012806708 hasConceptScore W2012806708C160671074 @default.
- W2012806708 hasConceptScore W2012806708C162996421 @default.
- W2012806708 hasConceptScore W2012806708C171250308 @default.
- W2012806708 hasConceptScore W2012806708C192562407 @default.
- W2012806708 hasConceptScore W2012806708C204223013 @default.
- W2012806708 hasConceptScore W2012806708C2777767291 @default.
- W2012806708 hasConceptScore W2012806708C2779227376 @default.
- W2012806708 hasConceptScore W2012806708C2780023022 @default.
- W2012806708 hasConceptScore W2012806708C41008148 @default.
- W2012806708 hasConceptScore W2012806708C49040817 @default.
- W2012806708 hasConceptScore W2012806708C53524968 @default.
- W2012806708 hasLocation W20128067081 @default.
- W2012806708 hasOpenAccess W2012806708 @default.
- W2012806708 hasPrimaryLocation W20128067081 @default.
- W2012806708 hasRelatedWork W1257777272 @default.
- W2012806708 hasRelatedWork W2006086410 @default.
- W2012806708 hasRelatedWork W2027095012 @default.
- W2012806708 hasRelatedWork W2031364729 @default.
- W2012806708 hasRelatedWork W2052805415 @default.
- W2012806708 hasRelatedWork W2079787243 @default.
- W2012806708 hasRelatedWork W2081221563 @default.
- W2012806708 hasRelatedWork W2506049589 @default.
- W2012806708 hasRelatedWork W2921363324 @default.
- W2012806708 hasRelatedWork W3132146265 @default.
- W2012806708 isParatext "false" @default.
- W2012806708 isRetracted "false" @default.
- W2012806708 magId "2012806708" @default.
- W2012806708 workType "article" @default.