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- W2012843923 endingPage "130" @default.
- W2012843923 startingPage "128" @default.
- W2012843923 abstract "A new process using photoresists as sacrificial layers has been developed to fabricate micromechanical components and systems. Commonly used photoresists are spun on a substrate as a sacrificial layer and patterned by a mask aligner. Free-standing metal structures are built by patterning a second layer of thick photoresist and electroplating on top of the photoresist sacrificial layer. Electrostatic microactuators and micromotors have been fabricated using the new photoresist sacrificial layer technique. Compared with all the existing sacrificial layer techniques, the photoresists used in the new process are easy to coat, easy to dissolve and less process steps are involved. The process is compatible with most of the materials and processes used in existing microfabrication technology. The fabrication of micromechanical systems becomes much simpler and cheaper with the use of a photoresist as a sacrificial layer." @default.
- W2012843923 created "2016-06-24" @default.
- W2012843923 creator A5065522218 @default.
- W2012843923 creator A5089494367 @default.
- W2012843923 date "1997-09-01" @default.
- W2012843923 modified "2023-09-27" @default.
- W2012843923 title "A new sacrificial layer process for the fabrication of micromechanical systems" @default.
- W2012843923 cites W2023706703 @default.
- W2012843923 cites W2048174705 @default.
- W2012843923 cites W2080538927 @default.
- W2012843923 cites W2090716011 @default.
- W2012843923 cites W2109110608 @default.
- W2012843923 doi "https://doi.org/10.1088/0960-1317/7/3/012" @default.
- W2012843923 hasPublicationYear "1997" @default.
- W2012843923 type Work @default.
- W2012843923 sameAs 2012843923 @default.
- W2012843923 citedByCount "34" @default.
- W2012843923 countsByYear W20128439232014 @default.
- W2012843923 countsByYear W20128439232016 @default.
- W2012843923 countsByYear W20128439232017 @default.
- W2012843923 countsByYear W20128439232018 @default.
- W2012843923 countsByYear W20128439232020 @default.
- W2012843923 countsByYear W20128439232021 @default.
- W2012843923 crossrefType "journal-article" @default.
- W2012843923 hasAuthorship W2012843923A5065522218 @default.
- W2012843923 hasAuthorship W2012843923A5089494367 @default.
- W2012843923 hasConcept C105487726 @default.
- W2012843923 hasConcept C111368507 @default.
- W2012843923 hasConcept C111919701 @default.
- W2012843923 hasConcept C127313418 @default.
- W2012843923 hasConcept C134406635 @default.
- W2012843923 hasConcept C136525101 @default.
- W2012843923 hasConcept C142724271 @default.
- W2012843923 hasConcept C171250308 @default.
- W2012843923 hasConcept C192562407 @default.
- W2012843923 hasConcept C204787440 @default.
- W2012843923 hasConcept C2777289219 @default.
- W2012843923 hasConcept C2779227376 @default.
- W2012843923 hasConcept C41008148 @default.
- W2012843923 hasConcept C51807945 @default.
- W2012843923 hasConcept C527607 @default.
- W2012843923 hasConcept C53524968 @default.
- W2012843923 hasConcept C71924100 @default.
- W2012843923 hasConcept C98045186 @default.
- W2012843923 hasConceptScore W2012843923C105487726 @default.
- W2012843923 hasConceptScore W2012843923C111368507 @default.
- W2012843923 hasConceptScore W2012843923C111919701 @default.
- W2012843923 hasConceptScore W2012843923C127313418 @default.
- W2012843923 hasConceptScore W2012843923C134406635 @default.
- W2012843923 hasConceptScore W2012843923C136525101 @default.
- W2012843923 hasConceptScore W2012843923C142724271 @default.
- W2012843923 hasConceptScore W2012843923C171250308 @default.
- W2012843923 hasConceptScore W2012843923C192562407 @default.
- W2012843923 hasConceptScore W2012843923C204787440 @default.
- W2012843923 hasConceptScore W2012843923C2777289219 @default.
- W2012843923 hasConceptScore W2012843923C2779227376 @default.
- W2012843923 hasConceptScore W2012843923C41008148 @default.
- W2012843923 hasConceptScore W2012843923C51807945 @default.
- W2012843923 hasConceptScore W2012843923C527607 @default.
- W2012843923 hasConceptScore W2012843923C53524968 @default.
- W2012843923 hasConceptScore W2012843923C71924100 @default.
- W2012843923 hasConceptScore W2012843923C98045186 @default.
- W2012843923 hasIssue "3" @default.
- W2012843923 hasLocation W20128439231 @default.
- W2012843923 hasOpenAccess W2012843923 @default.
- W2012843923 hasPrimaryLocation W20128439231 @default.
- W2012843923 hasRelatedWork W1551102922 @default.
- W2012843923 hasRelatedWork W2023999549 @default.
- W2012843923 hasRelatedWork W2049975348 @default.
- W2012843923 hasRelatedWork W2051814985 @default.
- W2012843923 hasRelatedWork W2061034136 @default.
- W2012843923 hasRelatedWork W2084545039 @default.
- W2012843923 hasRelatedWork W2092452837 @default.
- W2012843923 hasRelatedWork W2111754593 @default.
- W2012843923 hasRelatedWork W4246238382 @default.
- W2012843923 hasRelatedWork W4283765873 @default.
- W2012843923 hasVolume "7" @default.
- W2012843923 isParatext "false" @default.
- W2012843923 isRetracted "false" @default.
- W2012843923 magId "2012843923" @default.
- W2012843923 workType "article" @default.