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- W2012886688 abstract "A new approach is presented for designing a thin film thickness monitor using the frequency demodulation technique. The monitor permits film thicknesses to be measured to an accuracy of +or-1%. Provision is made for automatic termination of deposition and for measurement of rate control." @default.
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- W2012886688 title "A thickness monitor using the frequency demodulation technique" @default.
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- W2012886688 doi "https://doi.org/10.1088/0022-3735/12/8/002" @default.
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