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- W2012929719 abstract "A new photobleachable positive resist for KrF excimer laser lithography has been developed. The resist is composed of 2-diazo-1,3-dicarbonyl compound as the alkaline dissolution inhibitor and an alkaline-soluble styrene polymer as the mainpolymer. The new positive resist had excellent properties of photobleaching and dissolution kinetics. We achieved high aspect ratio half-micron pattern fabrication in 1.0 µm thickness with little loss of resist thickness using this new resist." @default.
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- W2012929719 date "1988-11-01" @default.
- W2012929719 modified "2023-09-25" @default.
- W2012929719 title "A New Photobleachable Positive Resist for KrF Excimer Laser Lithography" @default.
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- W2012929719 doi "https://doi.org/10.1143/jjap.27.l2219" @default.
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