Matches in SemOpenAlex for { <https://semopenalex.org/work/W2012931921> ?p ?o ?g. }
- W2012931921 endingPage "167" @default.
- W2012931921 startingPage "158" @default.
- W2012931921 abstract "Metal plasma immersion ion implantation and deposition (MePIIID) is a hybrid process combining cathodic arc deposition and plasma immersion ion implantation. The properties of a metal plasma produced by vacuum arcs are reviewed and the consequences for MePIIID are discussed. Different version of MePIIID are described and compared with traditional methods of surface modification such as ion beam assisted deposition (IBAD). MePIIID is a very versatile approach because of the wide range of ion species and energies used. At one extreme case, films are deposited with ions in the energy range 20–50 eV, and at the other extreme, ions can be implanted with high energy (100 keV or more) without film deposition. Novel features of the technique include the use of improved macroparticle filters; the implementation of several plasma sources for multi-element surface modification; tuning of ion energy during implantation and deposition to tailor the substrate-film intermixed layer and structure of the growing film; simultaneous pulsing of the plasma potential (positive) and substrate bias (negative) with a modified Marx generator; and the use of high ion charge states." @default.
- W2012931921 created "2016-06-24" @default.
- W2012931921 creator A5035493199 @default.
- W2012931921 date "1997-09-01" @default.
- W2012931921 modified "2023-10-16" @default.
- W2012931921 title "Metal plasma immersion ion implantation and deposition: a review" @default.
- W2012931921 cites W1748485138 @default.
- W2012931921 cites W1967962581 @default.
- W2012931921 cites W1968686770 @default.
- W2012931921 cites W1968953493 @default.
- W2012931921 cites W1970663899 @default.
- W2012931921 cites W1976069107 @default.
- W2012931921 cites W1977093078 @default.
- W2012931921 cites W1977810169 @default.
- W2012931921 cites W1978533334 @default.
- W2012931921 cites W1981806246 @default.
- W2012931921 cites W1988139372 @default.
- W2012931921 cites W1988514244 @default.
- W2012931921 cites W1988918653 @default.
- W2012931921 cites W1998223130 @default.
- W2012931921 cites W1998449396 @default.
- W2012931921 cites W1999092183 @default.
- W2012931921 cites W2006931422 @default.
- W2012931921 cites W2007333604 @default.
- W2012931921 cites W2007576784 @default.
- W2012931921 cites W2008020278 @default.
- W2012931921 cites W2011901139 @default.
- W2012931921 cites W2012779175 @default.
- W2012931921 cites W2014137241 @default.
- W2012931921 cites W2017418574 @default.
- W2012931921 cites W2017792706 @default.
- W2012931921 cites W2018753145 @default.
- W2012931921 cites W2019460631 @default.
- W2012931921 cites W2019993467 @default.
- W2012931921 cites W2021128588 @default.
- W2012931921 cites W2027401013 @default.
- W2012931921 cites W2030543000 @default.
- W2012931921 cites W2030828212 @default.
- W2012931921 cites W2032298710 @default.
- W2012931921 cites W2035071756 @default.
- W2012931921 cites W2039274541 @default.
- W2012931921 cites W2043503364 @default.
- W2012931921 cites W2044050166 @default.
- W2012931921 cites W2045730859 @default.
- W2012931921 cites W2048577518 @default.
- W2012931921 cites W2052349898 @default.
- W2012931921 cites W2054104743 @default.
- W2012931921 cites W2054156478 @default.
- W2012931921 cites W2058668819 @default.
- W2012931921 cites W2058938207 @default.
- W2012931921 cites W2070136887 @default.
- W2012931921 cites W2085508354 @default.
- W2012931921 cites W2086882517 @default.
- W2012931921 cites W2087696472 @default.
- W2012931921 cites W2088625309 @default.
- W2012931921 cites W2094995307 @default.
- W2012931921 cites W2095102166 @default.
- W2012931921 cites W2096618146 @default.
- W2012931921 cites W2119786251 @default.
- W2012931921 cites W2121879605 @default.
- W2012931921 cites W2131291580 @default.
- W2012931921 cites W2135045656 @default.
- W2012931921 cites W2136928218 @default.
- W2012931921 cites W2140015846 @default.
- W2012931921 cites W2147950654 @default.
- W2012931921 cites W2149812626 @default.
- W2012931921 cites W2164403327 @default.
- W2012931921 doi "https://doi.org/10.1016/s0257-8972(97)00037-6" @default.
- W2012931921 hasPublicationYear "1997" @default.
- W2012931921 type Work @default.
- W2012931921 sameAs 2012931921 @default.
- W2012931921 citedByCount "222" @default.
- W2012931921 countsByYear W20129319212012 @default.
- W2012931921 countsByYear W20129319212013 @default.
- W2012931921 countsByYear W20129319212014 @default.
- W2012931921 countsByYear W20129319212015 @default.
- W2012931921 countsByYear W20129319212016 @default.
- W2012931921 countsByYear W20129319212017 @default.
- W2012931921 countsByYear W20129319212018 @default.
- W2012931921 countsByYear W20129319212019 @default.
- W2012931921 countsByYear W20129319212020 @default.
- W2012931921 countsByYear W20129319212021 @default.
- W2012931921 countsByYear W20129319212022 @default.
- W2012931921 countsByYear W20129319212023 @default.
- W2012931921 crossrefType "journal-article" @default.
- W2012931921 hasAuthorship W2012931921A5035493199 @default.
- W2012931921 hasBestOaLocation W20129319213 @default.
- W2012931921 hasConcept C113196181 @default.
- W2012931921 hasConcept C115537861 @default.
- W2012931921 hasConcept C118442862 @default.
- W2012931921 hasConcept C121332964 @default.
- W2012931921 hasConcept C127413603 @default.
- W2012931921 hasConcept C145148216 @default.
- W2012931921 hasConcept C151730666 @default.
- W2012931921 hasConcept C171250308 @default.
- W2012931921 hasConcept C178790620 @default.
- W2012931921 hasConcept C185592680 @default.
- W2012931921 hasConcept C19067145 @default.