Matches in SemOpenAlex for { <https://semopenalex.org/work/W2012941535> ?p ?o ?g. }
Showing items 1 to 74 of
74
with 100 items per page.
- W2012941535 abstract "In this work, bulk-micromachined {111}-oriented silicon mirrors at 54.7 degree(s) have been fabricated in 20 wt% KOH solution at various temperatures and characterized with single mode fibers (10/125 and 5/125). In fabricating the mirrors, the etch rate of the (100) silicon surface was widely changed from 5.3 micrometers /hr to 73 micrometers /hr as the processing temperatures were varied from 40 degree(s)C to 80 degree(s)C. In spite of the tremendous variation of etch rate, the measured reflectivities of the mirrors showed fairly stable values of 63.7 - 58% at 1330 nm and 55.4 - 57.7% at 1550 nm respectively. This paper describes the silicon mirror processing conditions, measured reflectivities, reflected beam profiles, and a prototype integrated optical I/O coupler with the realized mirrors. The results obtained from this work show that optical I/O couplers with 54.7 degree(s) mirrors on conventional (100)-oriented silicon wafers are feasible, envisaging a synchronized optical clock distribution system as well as a distributed remote optical sensing system with low manufacturing cost." @default.
- W2012941535 created "2016-06-24" @default.
- W2012941535 creator A5005221998 @default.
- W2012941535 creator A5009651038 @default.
- W2012941535 creator A5033055896 @default.
- W2012941535 creator A5066761849 @default.
- W2012941535 creator A5091154115 @default.
- W2012941535 date "1996-09-23" @default.
- W2012941535 modified "2023-09-23" @default.
- W2012941535 title "<title>Reflectivity of micromachined {111}-oriented silicon mirrors for optical input/output couplers</title>" @default.
- W2012941535 doi "https://doi.org/10.1117/12.251255" @default.
- W2012941535 hasPublicationYear "1996" @default.
- W2012941535 type Work @default.
- W2012941535 sameAs 2012941535 @default.
- W2012941535 citedByCount "0" @default.
- W2012941535 crossrefType "proceedings-article" @default.
- W2012941535 hasAuthorship W2012941535A5005221998 @default.
- W2012941535 hasAuthorship W2012941535A5009651038 @default.
- W2012941535 hasAuthorship W2012941535A5033055896 @default.
- W2012941535 hasAuthorship W2012941535A5066761849 @default.
- W2012941535 hasAuthorship W2012941535A5091154115 @default.
- W2012941535 hasConcept C120665830 @default.
- W2012941535 hasConcept C121332964 @default.
- W2012941535 hasConcept C136525101 @default.
- W2012941535 hasConcept C142724271 @default.
- W2012941535 hasConcept C145667562 @default.
- W2012941535 hasConcept C160671074 @default.
- W2012941535 hasConcept C192562407 @default.
- W2012941535 hasConcept C204787440 @default.
- W2012941535 hasConcept C24890656 @default.
- W2012941535 hasConcept C2775997480 @default.
- W2012941535 hasConcept C49040817 @default.
- W2012941535 hasConcept C544956773 @default.
- W2012941535 hasConcept C71924100 @default.
- W2012941535 hasConceptScore W2012941535C120665830 @default.
- W2012941535 hasConceptScore W2012941535C121332964 @default.
- W2012941535 hasConceptScore W2012941535C136525101 @default.
- W2012941535 hasConceptScore W2012941535C142724271 @default.
- W2012941535 hasConceptScore W2012941535C145667562 @default.
- W2012941535 hasConceptScore W2012941535C160671074 @default.
- W2012941535 hasConceptScore W2012941535C192562407 @default.
- W2012941535 hasConceptScore W2012941535C204787440 @default.
- W2012941535 hasConceptScore W2012941535C24890656 @default.
- W2012941535 hasConceptScore W2012941535C2775997480 @default.
- W2012941535 hasConceptScore W2012941535C49040817 @default.
- W2012941535 hasConceptScore W2012941535C544956773 @default.
- W2012941535 hasConceptScore W2012941535C71924100 @default.
- W2012941535 hasLocation W20129415351 @default.
- W2012941535 hasOpenAccess W2012941535 @default.
- W2012941535 hasPrimaryLocation W20129415351 @default.
- W2012941535 hasRelatedWork W1920174402 @default.
- W2012941535 hasRelatedWork W2002166800 @default.
- W2012941535 hasRelatedWork W2055813178 @default.
- W2012941535 hasRelatedWork W2096762402 @default.
- W2012941535 hasRelatedWork W2097624082 @default.
- W2012941535 hasRelatedWork W2100395700 @default.
- W2012941535 hasRelatedWork W2106630616 @default.
- W2012941535 hasRelatedWork W2106861559 @default.
- W2012941535 hasRelatedWork W2111441559 @default.
- W2012941535 hasRelatedWork W2118111942 @default.
- W2012941535 hasRelatedWork W2120676138 @default.
- W2012941535 hasRelatedWork W2122963112 @default.
- W2012941535 hasRelatedWork W2125281751 @default.
- W2012941535 hasRelatedWork W2134229855 @default.
- W2012941535 hasRelatedWork W2141240264 @default.
- W2012941535 hasRelatedWork W2152483238 @default.
- W2012941535 hasRelatedWork W2158553525 @default.
- W2012941535 hasRelatedWork W2167652337 @default.
- W2012941535 hasRelatedWork W2417224594 @default.
- W2012941535 hasRelatedWork W2999166609 @default.
- W2012941535 isParatext "false" @default.
- W2012941535 isRetracted "false" @default.
- W2012941535 magId "2012941535" @default.
- W2012941535 workType "article" @default.