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- W2012993054 abstract "Precision probe metrology requires that the probe be carefully formed and measured. We demonstrate a method to accurately measure the shape of a probe in situ by scanning special measurement structures." @default.
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- W2012993054 date "1992-07-01" @default.
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- W2012993054 title "Probe characterization for scanning probe metrology" @default.
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- W2012993054 doi "https://doi.org/10.1016/0304-3991(92)90494-5" @default.
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