Matches in SemOpenAlex for { <https://semopenalex.org/work/W2012996329> ?p ?o ?g. }
Showing items 1 to 96 of
96
with 100 items per page.
- W2012996329 abstract "In this study, we have investigated the relation between the crystallinity of microcrystalline silicon (/spl mu/c-Si) films and the reaction kinetics of radicals in pulse-modulated plasma CVD employing technique of temporal radical control." @default.
- W2012996329 created "2016-06-24" @default.
- W2012996329 creator A5006676797 @default.
- W2012996329 creator A5055652136 @default.
- W2012996329 creator A5065340355 @default.
- W2012996329 creator A5084967051 @default.
- W2012996329 creator A5016654649 @default.
- W2012996329 date "2003-08-27" @default.
- W2012996329 modified "2023-09-24" @default.
- W2012996329 title "Temporal control of radicals for high crystallinity of microcrystalline silicon films in UHF SiH/sub 4//H/sub 2/ pulse-modulated plasma CVD" @default.
- W2012996329 cites W1994300145 @default.
- W2012996329 cites W2011316007 @default.
- W2012996329 cites W2031168800 @default.
- W2012996329 cites W2032879093 @default.
- W2012996329 cites W2035974261 @default.
- W2012996329 cites W2057633158 @default.
- W2012996329 doi "https://doi.org/10.1109/imnc.2002.1178625" @default.
- W2012996329 hasPublicationYear "2003" @default.
- W2012996329 type Work @default.
- W2012996329 sameAs 2012996329 @default.
- W2012996329 citedByCount "0" @default.
- W2012996329 crossrefType "proceedings-article" @default.
- W2012996329 hasAuthorship W2012996329A5006676797 @default.
- W2012996329 hasAuthorship W2012996329A5016654649 @default.
- W2012996329 hasAuthorship W2012996329A5055652136 @default.
- W2012996329 hasAuthorship W2012996329A5065340355 @default.
- W2012996329 hasAuthorship W2012996329A5084967051 @default.
- W2012996329 hasConcept C113196181 @default.
- W2012996329 hasConcept C120665830 @default.
- W2012996329 hasConcept C121332964 @default.
- W2012996329 hasConcept C139066938 @default.
- W2012996329 hasConcept C148898269 @default.
- W2012996329 hasConcept C159985019 @default.
- W2012996329 hasConcept C178790620 @default.
- W2012996329 hasConcept C185592680 @default.
- W2012996329 hasConcept C192562407 @default.
- W2012996329 hasConcept C201370411 @default.
- W2012996329 hasConcept C2776390347 @default.
- W2012996329 hasConcept C2779667780 @default.
- W2012996329 hasConcept C2780167933 @default.
- W2012996329 hasConcept C2993184922 @default.
- W2012996329 hasConcept C46275449 @default.
- W2012996329 hasConcept C49040817 @default.
- W2012996329 hasConcept C544956773 @default.
- W2012996329 hasConcept C62520636 @default.
- W2012996329 hasConcept C8010536 @default.
- W2012996329 hasConcept C82706917 @default.
- W2012996329 hasConcept C94915269 @default.
- W2012996329 hasConceptScore W2012996329C113196181 @default.
- W2012996329 hasConceptScore W2012996329C120665830 @default.
- W2012996329 hasConceptScore W2012996329C121332964 @default.
- W2012996329 hasConceptScore W2012996329C139066938 @default.
- W2012996329 hasConceptScore W2012996329C148898269 @default.
- W2012996329 hasConceptScore W2012996329C159985019 @default.
- W2012996329 hasConceptScore W2012996329C178790620 @default.
- W2012996329 hasConceptScore W2012996329C185592680 @default.
- W2012996329 hasConceptScore W2012996329C192562407 @default.
- W2012996329 hasConceptScore W2012996329C201370411 @default.
- W2012996329 hasConceptScore W2012996329C2776390347 @default.
- W2012996329 hasConceptScore W2012996329C2779667780 @default.
- W2012996329 hasConceptScore W2012996329C2780167933 @default.
- W2012996329 hasConceptScore W2012996329C2993184922 @default.
- W2012996329 hasConceptScore W2012996329C46275449 @default.
- W2012996329 hasConceptScore W2012996329C49040817 @default.
- W2012996329 hasConceptScore W2012996329C544956773 @default.
- W2012996329 hasConceptScore W2012996329C62520636 @default.
- W2012996329 hasConceptScore W2012996329C8010536 @default.
- W2012996329 hasConceptScore W2012996329C82706917 @default.
- W2012996329 hasConceptScore W2012996329C94915269 @default.
- W2012996329 hasLocation W20129963291 @default.
- W2012996329 hasOpenAccess W2012996329 @default.
- W2012996329 hasPrimaryLocation W20129963291 @default.
- W2012996329 hasRelatedWork W1965783822 @default.
- W2012996329 hasRelatedWork W1982671511 @default.
- W2012996329 hasRelatedWork W2070267162 @default.
- W2012996329 hasRelatedWork W2073168892 @default.
- W2012996329 hasRelatedWork W2081534270 @default.
- W2012996329 hasRelatedWork W2089332442 @default.
- W2012996329 hasRelatedWork W2097858470 @default.
- W2012996329 hasRelatedWork W2101791367 @default.
- W2012996329 hasRelatedWork W2143705934 @default.
- W2012996329 hasRelatedWork W2166177179 @default.
- W2012996329 hasRelatedWork W3139903544 @default.
- W2012996329 hasRelatedWork W3141615344 @default.
- W2012996329 hasRelatedWork W3143940412 @default.
- W2012996329 hasRelatedWork W3146340747 @default.
- W2012996329 hasRelatedWork W3148147467 @default.
- W2012996329 hasRelatedWork W3148418587 @default.
- W2012996329 hasRelatedWork W3149246569 @default.
- W2012996329 hasRelatedWork W3150423650 @default.
- W2012996329 hasRelatedWork W3151134948 @default.
- W2012996329 hasRelatedWork W3151883734 @default.
- W2012996329 isParatext "false" @default.
- W2012996329 isRetracted "false" @default.
- W2012996329 magId "2012996329" @default.
- W2012996329 workType "article" @default.