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- W2013017949 abstract "SiC thin films have been grown in situ on Si[100] substrates using a XeCl excimer laser (λ = 308 nm). The films were deposited at different temperatures, from room temperature to 900 °C. The structure of the films was studied using modern analysis techniques, such as AES, XPS, TEM, STM, and IR. Polycrystalline α-SiC thin films grown on Si[100] substrates were obtained at 800 °C. The thin films were annealed at 1000 °C in a vacuum system. The effect of annealing disposition on the structure of the film was studied. TEM analysis shows that the annealed film has a hexagonal structure which includes 4H, 8H Or 4H + 8H." @default.
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- W2013017949 date "1997-09-01" @default.
- W2013017949 modified "2023-10-16" @default.
- W2013017949 title "The effects of annealing disposition on α-SiC thin films prepared by pulsed laser deposition" @default.
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- W2013017949 doi "https://doi.org/10.1016/s0025-5408(97)00097-4" @default.
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