FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2013025216> ?p ?o ?g. }

• W2013025216 endingPage "350" @default.
• W2013025216 startingPage "331" @default.
• W2013025216 abstract "Advanced semiconductor circuits, such as DRAMs, are based on very complex fabrication processes. Because of the cost and complexity involved, it is rapidly becoming impossible to adopt a “trial-and-error” approach in the development stage of a new process. Fortunately, the advances in computer power spurred by the new semiconductor devices have made it possible to compute the response of complex systems in a reasonable time on workstations. Thus, the study of a virtual representation of the process (that is, a model) can represent a solution to the high cost of process development—of course, after verification of the model accuracy through controlled experiments. A correct physical interpretation of the process under study is necessary in order to implement a model that is both accurate and extendible. This is particularly true for new approaches, such as those involved in X-ray lithography. We have studied the process of image formation in X-ray lithography and have implemented several models to predict the intensity distribution at the wafer plane. The models can be applied to the definition of an optimal exposure system that will provide the maximum exposure latitude, and to the study of new types of X-ray masks." @default.
• W2013025216 created "2016-06-24" @default.
• W2013025216 creator A5010157089 @default.
• W2013025216 creator A5016680009 @default.
• W2013025216 date "1993-05-01" @default.
• W2013025216 modified "2023-09-26" @default.
• W2013025216 title "Modeling X-ray proximity lithography" @default.
• W2013025216 cites W1435890786 @default.
• W2013025216 cites W1658472922 @default.
• W2013025216 cites W1666853924 @default.
• W2013025216 cites W1975816485 @default.
• W2013025216 cites W1976480518 @default.
• W2013025216 cites W1990614317 @default.
• W2013025216 cites W2007992583 @default.
• W2013025216 cites W2013573956 @default.
• W2013025216 cites W2019020744 @default.
• W2013025216 cites W2021053149 @default.
• W2013025216 cites W2031985449 @default.
• W2013025216 cites W2045295655 @default.
• W2013025216 cites W2045546029 @default.
• W2013025216 cites W2049704170 @default.
• W2013025216 cites W2050274275 @default.
• W2013025216 cites W2052430853 @default.
• W2013025216 cites W2053013242 @default.
• W2013025216 cites W2060328325 @default.
• W2013025216 cites W2060545255 @default.
• W2013025216 cites W2060562115 @default.
• W2013025216 cites W2067415827 @default.
• W2013025216 cites W2072809290 @default.
• W2013025216 cites W2073285414 @default.
• W2013025216 cites W2073731654 @default.
• W2013025216 cites W2088788954 @default.
• W2013025216 cites W2090751786 @default.
• W2013025216 cites W2098940077 @default.
• W2013025216 cites W2162123284 @default.
• W2013025216 cites W2798368384 @default.
• W2013025216 cites W3039083618 @default.
• W2013025216 cites W2014150771 @default.
• W2013025216 doi "https://doi.org/10.1147/rd.373.0331" @default.
• W2013025216 hasPublicationYear "1993" @default.
• W2013025216 type Work @default.
• W2013025216 sameAs 2013025216 @default.
• W2013025216 citedByCount "21" @default.
• W2013025216 countsByYear W20130252162012 @default.
• W2013025216 countsByYear W20130252162013 @default.
• W2013025216 countsByYear W20130252162023 @default.
• W2013025216 crossrefType "journal-article" @default.
• W2013025216 hasAuthorship W2013025216A5010157089 @default.
• W2013025216 hasAuthorship W2013025216A5016680009 @default.
• W2013025216 hasConcept C111919701 @default.
• W2013025216 hasConcept C119599485 @default.
• W2013025216 hasConcept C120665830 @default.
• W2013025216 hasConcept C121332964 @default.
• W2013025216 hasConcept C127413603 @default.
• W2013025216 hasConcept C142362112 @default.
• W2013025216 hasConcept C153349607 @default.
• W2013025216 hasConcept C160671074 @default.
• W2013025216 hasConcept C171250308 @default.
• W2013025216 hasConcept C17744445 @default.
• W2013025216 hasConcept C192562407 @default.
• W2013025216 hasConcept C199539241 @default.
• W2013025216 hasConcept C204223013 @default.
• W2013025216 hasConcept C24326235 @default.
• W2013025216 hasConcept C2776359362 @default.
• W2013025216 hasConcept C2777402240 @default.
• W2013025216 hasConcept C2779227376 @default.
• W2013025216 hasConcept C41008148 @default.
• W2013025216 hasConcept C41794268 @default.
• W2013025216 hasConcept C530198007 @default.
• W2013025216 hasConcept C53524968 @default.
• W2013025216 hasConcept C66018809 @default.
• W2013025216 hasConcept C67953723 @default.
• W2013025216 hasConcept C7366592 @default.
• W2013025216 hasConcept C9390403 @default.
• W2013025216 hasConcept C94625758 @default.
• W2013025216 hasConcept C98045186 @default.
• W2013025216 hasConceptScore W2013025216C111919701 @default.
• W2013025216 hasConceptScore W2013025216C119599485 @default.
• W2013025216 hasConceptScore W2013025216C120665830 @default.
• W2013025216 hasConceptScore W2013025216C121332964 @default.
• W2013025216 hasConceptScore W2013025216C127413603 @default.
• W2013025216 hasConceptScore W2013025216C142362112 @default.
• W2013025216 hasConceptScore W2013025216C153349607 @default.
• W2013025216 hasConceptScore W2013025216C160671074 @default.
• W2013025216 hasConceptScore W2013025216C171250308 @default.
• W2013025216 hasConceptScore W2013025216C17744445 @default.
• W2013025216 hasConceptScore W2013025216C192562407 @default.
• W2013025216 hasConceptScore W2013025216C199539241 @default.
• W2013025216 hasConceptScore W2013025216C204223013 @default.
• W2013025216 hasConceptScore W2013025216C24326235 @default.
• W2013025216 hasConceptScore W2013025216C2776359362 @default.
• W2013025216 hasConceptScore W2013025216C2777402240 @default.
• W2013025216 hasConceptScore W2013025216C2779227376 @default.
• W2013025216 hasConceptScore W2013025216C41008148 @default.
• W2013025216 hasConceptScore W2013025216C41794268 @default.
• W2013025216 hasConceptScore W2013025216C530198007 @default.
• W2013025216 hasConceptScore W2013025216C53524968 @default.
• W2013025216 hasConceptScore W2013025216C66018809 @default.

• next