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• W2013059497 abstract "Boron implantation into silicon offers a unique system for studying the gettering mechanisms of Fe. Using deep level transient spectroscopy to monitor the remaining Fe in the gettered region and secondary-ion-mass spectroscopy to measure the concentration of Fe redistributed to the B region, we show that the gettering mechanisms can be quantitatively described. A combination of Fermi-level-induced Fe+ charge-state stabilization and Fe+–B− pairing acts to lower the free energy of Fe in p+ regions. This can lead to Fe partition coefficients as high as 106 at a p+/p interface at temperatures below ≊400 °C. The dynamic response of the system is diffusion limited during the cooling cycle. B gettering is more effective than gettering produced by Si implantation damage and more effective than trapping by a neutral impurity such as C. These mechanisms also make a large contribution to the effective gettering of Fe by p/p+ epitaxial silicon wafers. The Fermi-level/pairing gettering mechanism is also expected to operate for Cr and Mn." @default.
• W2013059497 created "2016-06-24" @default.
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• W2013059497 date "1996-09-15" @default.
• W2013059497 modified "2023-10-02" @default.
• W2013059497 title "Iron gettering mechanisms in silicon" @default.
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• W2013059497 doi "https://doi.org/10.1063/1.363236" @default.
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