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• W2013060339 endingPage "810" @default.
• W2013060339 startingPage "810" @default.
• W2013060339 abstract "The hydrogen content in a-SiC:H films prepared by the plasma decomposition of gas mixtures of silane and methane or ethylene was measured by 1 H( 15 N, αγ) 12 C nuclear reaction (NR) and infrared absorption spectroscopy (IR). The contents observed by both methods can be made to agree well for most of the films by putting the average value of the inverse absorption cross section for the CH n ( n =1, 2 and 3) stretching mode over all values of n as A s =1.0×10 21 cm -2 . In some films prepared from silane and ethylene mixtures, the hydrogen content given by NR was higher than that by IR. Hydrogen release from films with a hydrogen content of over 30 atm.% was observed during NR analysis. The mechanism of the hydrogen release is discussed by comparing the IR spectra before and after ion bombardment." @default.
• W2013060339 created "2016-06-24" @default.
• W2013060339 creator A5007005768 @default.
• W2013060339 creator A5012278399 @default.
• W2013060339 creator A5013975751 @default.
• W2013060339 creator A5013979782 @default.
• W2013060339 creator A5021290141 @default.
• W2013060339 creator A5031705180 @default.
• W2013060339 creator A5055876250 @default.
• W2013060339 creator A5060412731 @default.
• W2013060339 creator A5064176940 @default.
• W2013060339 creator A5068052589 @default.
• W2013060339 creator A5090196124 @default.
• W2013060339 date "1984-07-01" @default.
• W2013060339 modified "2023-10-02" @default.
• W2013060339 title "Hydrogen Content in a-SiC:H Films Prepared by Plasma Decomposition of Silane and Methane or Ethylene" @default.
• W2013060339 cites W1972055775 @default.
• W2013060339 cites W1972632456 @default.
• W2013060339 cites W1982416952 @default.
• W2013060339 cites W2005442885 @default.
• W2013060339 cites W2005708202 @default.
• W2013060339 cites W2012222819 @default.
• W2013060339 cites W2080689214 @default.
• W2013060339 cites W2091681409 @default.
• W2013060339 cites W2096544402 @default.
• W2013060339 doi "https://doi.org/10.1143/jjap.23.810" @default.
• W2013060339 hasPublicationYear "1984" @default.
• W2013060339 type Work @default.
• W2013060339 sameAs 2013060339 @default.
• W2013060339 citedByCount "85" @default.
• W2013060339 countsByYear W20130603392013 @default.
• W2013060339 countsByYear W20130603392016 @default.
• W2013060339 countsByYear W20130603392017 @default.
• W2013060339 countsByYear W20130603392018 @default.
• W2013060339 countsByYear W20130603392019 @default.
• W2013060339 countsByYear W20130603392022 @default.
• W2013060339 crossrefType "journal-article" @default.
• W2013060339 hasAuthorship W2013060339A5007005768 @default.
• W2013060339 hasAuthorship W2013060339A5012278399 @default.
• W2013060339 hasAuthorship W2013060339A5013975751 @default.
• W2013060339 hasAuthorship W2013060339A5013979782 @default.
• W2013060339 hasAuthorship W2013060339A5021290141 @default.
• W2013060339 hasAuthorship W2013060339A5031705180 @default.
• W2013060339 hasAuthorship W2013060339A5055876250 @default.
• W2013060339 hasAuthorship W2013060339A5060412731 @default.
• W2013060339 hasAuthorship W2013060339A5064176940 @default.
• W2013060339 hasAuthorship W2013060339A5068052589 @default.
• W2013060339 hasAuthorship W2013060339A5090196124 @default.
• W2013060339 hasConcept C113196181 @default.
• W2013060339 hasConcept C119824511 @default.
• W2013060339 hasConcept C121332964 @default.
• W2013060339 hasConcept C124681953 @default.
• W2013060339 hasConcept C125287762 @default.
• W2013060339 hasConcept C153642686 @default.
• W2013060339 hasConcept C159985019 @default.
• W2013060339 hasConcept C161790260 @default.
• W2013060339 hasConcept C178790620 @default.
• W2013060339 hasConcept C179104552 @default.
• W2013060339 hasConcept C185592680 @default.
• W2013060339 hasConcept C192562407 @default.
• W2013060339 hasConcept C2778024649 @default.
• W2013060339 hasConcept C2778597550 @default.
• W2013060339 hasConcept C512968161 @default.
• W2013060339 hasConcept C516920438 @default.
• W2013060339 hasConcept C62520636 @default.
• W2013060339 hasConceptScore W2013060339C113196181 @default.
• W2013060339 hasConceptScore W2013060339C119824511 @default.
• W2013060339 hasConceptScore W2013060339C121332964 @default.
• W2013060339 hasConceptScore W2013060339C124681953 @default.
• W2013060339 hasConceptScore W2013060339C125287762 @default.
• W2013060339 hasConceptScore W2013060339C153642686 @default.
• W2013060339 hasConceptScore W2013060339C159985019 @default.
• W2013060339 hasConceptScore W2013060339C161790260 @default.
• W2013060339 hasConceptScore W2013060339C178790620 @default.
• W2013060339 hasConceptScore W2013060339C179104552 @default.
• W2013060339 hasConceptScore W2013060339C185592680 @default.
• W2013060339 hasConceptScore W2013060339C192562407 @default.
• W2013060339 hasConceptScore W2013060339C2778024649 @default.
• W2013060339 hasConceptScore W2013060339C2778597550 @default.
• W2013060339 hasConceptScore W2013060339C512968161 @default.
• W2013060339 hasConceptScore W2013060339C516920438 @default.
• W2013060339 hasConceptScore W2013060339C62520636 @default.
• W2013060339 hasIssue "7R" @default.
• W2013060339 hasLocation W20130603391 @default.
• W2013060339 hasOpenAccess W2013060339 @default.
• W2013060339 hasPrimaryLocation W20130603391 @default.
• W2013060339 hasRelatedWork W1976891362 @default.
• W2013060339 hasRelatedWork W1981209631 @default.
• W2013060339 hasRelatedWork W2013060339 @default.
• W2013060339 hasRelatedWork W2047064754 @default.
• W2013060339 hasRelatedWork W2087700749 @default.
• W2013060339 hasRelatedWork W2286429651 @default.
• W2013060339 hasRelatedWork W2313982740 @default.
• W2013060339 hasRelatedWork W2524225839 @default.
• W2013060339 hasRelatedWork W3147363069 @default.
• W2013060339 hasRelatedWork W4255302468 @default.
• W2013060339 hasVolume "23" @default.
• W2013060339 isParatext "false" @default.

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