Matches in SemOpenAlex for { <https://semopenalex.org/work/W2013062405> ?p ?o ?g. }
- W2013062405 endingPage "6382" @default.
- W2013062405 startingPage "6380" @default.
- W2013062405 abstract "A dual piezoelectric actuation bridge of in-plane polarized lead zirconate titanate (PZT) film is demonstrated. The in-plane polarized PZT film makes the development of a bending mechanism in the d33 mode, which exhibits a strain performance twice that of the d31 mode. Further, this design can provide deflection exceeding the structure thickness and individual driving mechanism for improving reliability of the devices. In order to simplify the fabrication process, a photoresist and Au are selected for the sacrificial and structural materials, respectively. The PZT thin film, which is deposited on the Au structural layer by the RF magnetron sputtering method, is poled and driven with interdigitated electrodes (IDEs) in order to exploit d33 mode actuation. The fabricated actuator exhibits good performance with a fast response time of <500 ms and low driving voltage of 5 V. This design can also be applied for a linearly tunable capacitor, depending on the magnitude of biasing voltage." @default.
- W2013062405 created "2016-06-24" @default.
- W2013062405 creator A5013138730 @default.
- W2013062405 creator A5032685639 @default.
- W2013062405 date "2008-08-08" @default.
- W2013062405 modified "2023-09-25" @default.
- W2013062405 title "Dual Piezoelectric Actuation Bridge of In-Plane Polarized Lead Zirconate Titanate Film" @default.
- W2013062405 cites W110025288 @default.
- W2013062405 cites W1694770920 @default.
- W2013062405 cites W1989875015 @default.
- W2013062405 cites W2007771236 @default.
- W2013062405 cites W2018736855 @default.
- W2013062405 cites W2020283400 @default.
- W2013062405 cites W2033513172 @default.
- W2013062405 cites W2044155715 @default.
- W2013062405 cites W2050180880 @default.
- W2013062405 cites W2054359639 @default.
- W2013062405 cites W2066987373 @default.
- W2013062405 cites W2078543349 @default.
- W2013062405 cites W2079080630 @default.
- W2013062405 cites W2121959701 @default.
- W2013062405 doi "https://doi.org/10.1143/jjap.47.6380" @default.
- W2013062405 hasPublicationYear "2008" @default.
- W2013062405 type Work @default.
- W2013062405 sameAs 2013062405 @default.
- W2013062405 citedByCount "0" @default.
- W2013062405 crossrefType "journal-article" @default.
- W2013062405 hasAuthorship W2013062405A5013138730 @default.
- W2013062405 hasAuthorship W2013062405A5032685639 @default.
- W2013062405 hasConcept C100082104 @default.
- W2013062405 hasConcept C119599485 @default.
- W2013062405 hasConcept C127413603 @default.
- W2013062405 hasConcept C133386390 @default.
- W2013062405 hasConcept C134406635 @default.
- W2013062405 hasConcept C136525101 @default.
- W2013062405 hasConcept C142724271 @default.
- W2013062405 hasConcept C147789679 @default.
- W2013062405 hasConcept C159985019 @default.
- W2013062405 hasConcept C165801399 @default.
- W2013062405 hasConcept C171250308 @default.
- W2013062405 hasConcept C172707124 @default.
- W2013062405 hasConcept C17525397 @default.
- W2013062405 hasConcept C175616097 @default.
- W2013062405 hasConcept C185592680 @default.
- W2013062405 hasConcept C192562407 @default.
- W2013062405 hasConcept C20254490 @default.
- W2013062405 hasConcept C204787440 @default.
- W2013062405 hasConcept C2779227376 @default.
- W2013062405 hasConcept C2781128178 @default.
- W2013062405 hasConcept C49040817 @default.
- W2013062405 hasConcept C52192207 @default.
- W2013062405 hasConcept C57528182 @default.
- W2013062405 hasConcept C58373989 @default.
- W2013062405 hasConcept C71924100 @default.
- W2013062405 hasConcept C79090758 @default.
- W2013062405 hasConceptScore W2013062405C100082104 @default.
- W2013062405 hasConceptScore W2013062405C119599485 @default.
- W2013062405 hasConceptScore W2013062405C127413603 @default.
- W2013062405 hasConceptScore W2013062405C133386390 @default.
- W2013062405 hasConceptScore W2013062405C134406635 @default.
- W2013062405 hasConceptScore W2013062405C136525101 @default.
- W2013062405 hasConceptScore W2013062405C142724271 @default.
- W2013062405 hasConceptScore W2013062405C147789679 @default.
- W2013062405 hasConceptScore W2013062405C159985019 @default.
- W2013062405 hasConceptScore W2013062405C165801399 @default.
- W2013062405 hasConceptScore W2013062405C171250308 @default.
- W2013062405 hasConceptScore W2013062405C172707124 @default.
- W2013062405 hasConceptScore W2013062405C17525397 @default.
- W2013062405 hasConceptScore W2013062405C175616097 @default.
- W2013062405 hasConceptScore W2013062405C185592680 @default.
- W2013062405 hasConceptScore W2013062405C192562407 @default.
- W2013062405 hasConceptScore W2013062405C20254490 @default.
- W2013062405 hasConceptScore W2013062405C204787440 @default.
- W2013062405 hasConceptScore W2013062405C2779227376 @default.
- W2013062405 hasConceptScore W2013062405C2781128178 @default.
- W2013062405 hasConceptScore W2013062405C49040817 @default.
- W2013062405 hasConceptScore W2013062405C52192207 @default.
- W2013062405 hasConceptScore W2013062405C57528182 @default.
- W2013062405 hasConceptScore W2013062405C58373989 @default.
- W2013062405 hasConceptScore W2013062405C71924100 @default.
- W2013062405 hasConceptScore W2013062405C79090758 @default.
- W2013062405 hasIssue "8" @default.
- W2013062405 hasLocation W20130624051 @default.
- W2013062405 hasOpenAccess W2013062405 @default.
- W2013062405 hasPrimaryLocation W20130624051 @default.
- W2013062405 hasRelatedWork W1966846703 @default.
- W2013062405 hasRelatedWork W2025783629 @default.
- W2013062405 hasRelatedWork W2031724398 @default.
- W2013062405 hasRelatedWork W2179579073 @default.
- W2013062405 hasRelatedWork W2196706113 @default.
- W2013062405 hasRelatedWork W2281145519 @default.
- W2013062405 hasRelatedWork W2367525499 @default.
- W2013062405 hasRelatedWork W2374997983 @default.
- W2013062405 hasRelatedWork W2743771956 @default.
- W2013062405 hasRelatedWork W4207028589 @default.
- W2013062405 hasVolume "47" @default.
- W2013062405 isParatext "false" @default.
- W2013062405 isRetracted "false" @default.