FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2013076019> ?p ?o ?g. }

• W2013076019 endingPage "38" @default.
• W2013076019 startingPage "28" @default.
• W2013076019 abstract "Hydrogenated amorphous carbon (a-C:H) layers deposited at near room temperature by CH4 r.f. discharge have been studied. The role of plasma chemistry and of fluxes of neutrals and ions is discussed. The layers' properties have been characterized by means of density measurements, UV-Vis absorption, electron spin resonance and electrical conductivity. Hydrogen incorporation, carbon bonding and network structure have been studied by Fourier transform IR and Raman spectroscopies, secondary ion mass spectrometry and X-ray photoelectron spectroscopy. It is shown that the substrate bias voltage (and then the ions' average energy) is the most important deposition parameter for the surface morphology and for the film properties." @default.
• W2013076019 created "2016-06-24" @default.
• W2013076019 creator A5010787805 @default.
• W2013076019 creator A5058606225 @default.
• W2013076019 date "1994-03-01" @default.
• W2013076019 modified "2023-09-25" @default.
• W2013076019 title "Plasma deposition of hydrogenated amorphous carbon: growth rates, properties and structures" @default.
• W2013076019 cites W1513544041 @default.
• W2013076019 cites W1968490527 @default.
• W2013076019 cites W1971422279 @default.
• W2013076019 cites W1981223668 @default.
• W2013076019 cites W1981532468 @default.
• W2013076019 cites W1989605237 @default.
• W2013076019 cites W1992902526 @default.
• W2013076019 cites W1993517518 @default.
• W2013076019 cites W1999511867 @default.
• W2013076019 cites W2000690946 @default.
• W2013076019 cites W2004554003 @default.
• W2013076019 cites W2005689134 @default.
• W2013076019 cites W2013248668 @default.
• W2013076019 cites W2016674500 @default.
• W2013076019 cites W2031746601 @default.
• W2013076019 cites W2032879093 @default.
• W2013076019 cites W2034865359 @default.
• W2013076019 cites W2050286979 @default.
• W2013076019 cites W2058272047 @default.
• W2013076019 cites W2059039967 @default.
• W2013076019 cites W2064903819 @default.
• W2013076019 cites W2067979108 @default.
• W2013076019 cites W2076728005 @default.
• W2013076019 cites W2079172076 @default.
• W2013076019 cites W2087329515 @default.
• W2013076019 cites W2088892893 @default.
• W2013076019 cites W2089908421 @default.
• W2013076019 cites W2117309825 @default.
• W2013076019 cites W2117482563 @default.
• W2013076019 cites W2125206942 @default.
• W2013076019 cites W2138293855 @default.
• W2013076019 doi "https://doi.org/10.1016/0040-6090(94)90689-0" @default.
• W2013076019 hasPublicationYear "1994" @default.
• W2013076019 type Work @default.
• W2013076019 sameAs 2013076019 @default.
• W2013076019 citedByCount "77" @default.
• W2013076019 countsByYear W20130760192012 @default.
• W2013076019 countsByYear W20130760192013 @default.
• W2013076019 countsByYear W20130760192014 @default.
• W2013076019 countsByYear W20130760192016 @default.
• W2013076019 countsByYear W20130760192018 @default.
• W2013076019 countsByYear W20130760192020 @default.
• W2013076019 countsByYear W20130760192021 @default.
• W2013076019 countsByYear W20130760192023 @default.
• W2013076019 crossrefType "journal-article" @default.
• W2013076019 hasAuthorship W2013076019A5010787805 @default.
• W2013076019 hasAuthorship W2013076019A5058606225 @default.
• W2013076019 hasConcept C104779481 @default.
• W2013076019 hasConcept C111368507 @default.
• W2013076019 hasConcept C113196181 @default.
• W2013076019 hasConcept C120665830 @default.
• W2013076019 hasConcept C121332964 @default.
• W2013076019 hasConcept C127313418 @default.
• W2013076019 hasConcept C127413603 @default.
• W2013076019 hasConcept C140205800 @default.
• W2013076019 hasConcept C145148216 @default.
• W2013076019 hasConcept C151730666 @default.
• W2013076019 hasConcept C159985019 @default.
• W2013076019 hasConcept C160892712 @default.
• W2013076019 hasConcept C171250308 @default.
• W2013076019 hasConcept C175708663 @default.
• W2013076019 hasConcept C178790620 @default.
• W2013076019 hasConcept C185592680 @default.
• W2013076019 hasConcept C19067145 @default.
• W2013076019 hasConcept C192562407 @default.
• W2013076019 hasConcept C201931942 @default.
• W2013076019 hasConcept C2777289219 @default.
• W2013076019 hasConcept C2816523 @default.
• W2013076019 hasConcept C40003534 @default.
• W2013076019 hasConcept C42360764 @default.
• W2013076019 hasConcept C56052488 @default.
• W2013076019 hasConcept C64297162 @default.
• W2013076019 hasConcept C75937256 @default.
• W2013076019 hasConcept C8010536 @default.
• W2013076019 hasConcept C86803240 @default.
• W2013076019 hasConceptScore W2013076019C104779481 @default.
• W2013076019 hasConceptScore W2013076019C111368507 @default.
• W2013076019 hasConceptScore W2013076019C113196181 @default.
• W2013076019 hasConceptScore W2013076019C120665830 @default.
• W2013076019 hasConceptScore W2013076019C121332964 @default.
• W2013076019 hasConceptScore W2013076019C127313418 @default.
• W2013076019 hasConceptScore W2013076019C127413603 @default.
• W2013076019 hasConceptScore W2013076019C140205800 @default.
• W2013076019 hasConceptScore W2013076019C145148216 @default.
• W2013076019 hasConceptScore W2013076019C151730666 @default.
• W2013076019 hasConceptScore W2013076019C159985019 @default.
• W2013076019 hasConceptScore W2013076019C160892712 @default.
• W2013076019 hasConceptScore W2013076019C171250308 @default.
• W2013076019 hasConceptScore W2013076019C175708663 @default.
• W2013076019 hasConceptScore W2013076019C178790620 @default.
• W2013076019 hasConceptScore W2013076019C185592680 @default.

• next