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• W2013083334 abstract "Fabrication of Si and SiGe vertical dual carrier field effect transistor (VDCFET) with effective channel length of 30nm, using lithographic equipment for linewidths greater than 180nm, is presented. The main process of fabrication used is ion implantation for Si VDCFET. The main process of fabrication used is molecular beam epitaxy for SiGe VDCFET. Fabrication of SOI switching VDCFET flip flop with effective channel length of 30nm, using lithographic equipment for linewidths greater than 180nm, is also presented." @default.
• W2013083334 created "2016-06-24" @default.
• W2013083334 creator A5001035103 @default.
• W2013083334 creator A5002346706 @default.
• W2013083334 creator A5009434167 @default.
• W2013083334 creator A5009807537 @default.
• W2013083334 creator A5015181756 @default.
• W2013083334 creator A5015314590 @default.
• W2013083334 creator A5027327117 @default.
• W2013083334 creator A5031219613 @default.
• W2013083334 creator A5038709211 @default.
• W2013083334 creator A5047680687 @default.
• W2013083334 creator A5051329508 @default.
• W2013083334 creator A5052266615 @default.
• W2013083334 creator A5053716293 @default.
• W2013083334 creator A5057078801 @default.
• W2013083334 creator A5061021538 @default.
• W2013083334 creator A5065241841 @default.
• W2013083334 creator A5069690316 @default.
• W2013083334 creator A5070105230 @default.
• W2013083334 creator A5080464693 @default.
• W2013083334 creator A5089742133 @default.
• W2013083334 date "2003-01-01" @default.
• W2013083334 modified "2023-10-18" @default.
• W2013083334 title "Fabrication of Si and SiGe vertical dual carrier field effect transistor and its SOI resistor load switching ASIC with effective channel length of 30nm" @default.
• W2013083334 cites W1967515551 @default.
• W2013083334 cites W2149536603 @default.
• W2013083334 doi "https://doi.org/10.1109/icasic.2003.1277465" @default.
• W2013083334 hasPublicationYear "2003" @default.
• W2013083334 type Work @default.
• W2013083334 sameAs 2013083334 @default.
• W2013083334 citedByCount "5" @default.
• W2013083334 crossrefType "proceedings-article" @default.
• W2013083334 hasAuthorship W2013083334A5001035103 @default.
• W2013083334 hasAuthorship W2013083334A5002346706 @default.
• W2013083334 hasAuthorship W2013083334A5009434167 @default.
• W2013083334 hasAuthorship W2013083334A5009807537 @default.
• W2013083334 hasAuthorship W2013083334A5015181756 @default.
• W2013083334 hasAuthorship W2013083334A5015314590 @default.
• W2013083334 hasAuthorship W2013083334A5027327117 @default.
• W2013083334 hasAuthorship W2013083334A5031219613 @default.
• W2013083334 hasAuthorship W2013083334A5038709211 @default.
• W2013083334 hasAuthorship W2013083334A5047680687 @default.
• W2013083334 hasAuthorship W2013083334A5051329508 @default.
• W2013083334 hasAuthorship W2013083334A5052266615 @default.
• W2013083334 hasAuthorship W2013083334A5053716293 @default.
• W2013083334 hasAuthorship W2013083334A5057078801 @default.
• W2013083334 hasAuthorship W2013083334A5061021538 @default.
• W2013083334 hasAuthorship W2013083334A5065241841 @default.
• W2013083334 hasAuthorship W2013083334A5069690316 @default.
• W2013083334 hasAuthorship W2013083334A5070105230 @default.
• W2013083334 hasAuthorship W2013083334A5080464693 @default.
• W2013083334 hasAuthorship W2013083334A5089742133 @default.
• W2013083334 hasConcept C119599485 @default.
• W2013083334 hasConcept C127162648 @default.
• W2013083334 hasConcept C127413603 @default.
• W2013083334 hasConcept C136525101 @default.
• W2013083334 hasConcept C137488568 @default.
• W2013083334 hasConcept C142724271 @default.
• W2013083334 hasConcept C145598152 @default.
• W2013083334 hasConcept C165801399 @default.
• W2013083334 hasConcept C172385210 @default.
• W2013083334 hasConcept C192562407 @default.
• W2013083334 hasConcept C204787440 @default.
• W2013083334 hasConcept C24326235 @default.
• W2013083334 hasConcept C49040817 @default.
• W2013083334 hasConcept C53143962 @default.
• W2013083334 hasConcept C544956773 @default.
• W2013083334 hasConcept C71924100 @default.
• W2013083334 hasConcept C77390884 @default.
• W2013083334 hasConceptScore W2013083334C119599485 @default.
• W2013083334 hasConceptScore W2013083334C127162648 @default.
• W2013083334 hasConceptScore W2013083334C127413603 @default.
• W2013083334 hasConceptScore W2013083334C136525101 @default.
• W2013083334 hasConceptScore W2013083334C137488568 @default.
• W2013083334 hasConceptScore W2013083334C142724271 @default.
• W2013083334 hasConceptScore W2013083334C145598152 @default.
• W2013083334 hasConceptScore W2013083334C165801399 @default.
• W2013083334 hasConceptScore W2013083334C172385210 @default.
• W2013083334 hasConceptScore W2013083334C192562407 @default.
• W2013083334 hasConceptScore W2013083334C204787440 @default.
• W2013083334 hasConceptScore W2013083334C24326235 @default.
• W2013083334 hasConceptScore W2013083334C49040817 @default.
• W2013083334 hasConceptScore W2013083334C53143962 @default.
• W2013083334 hasConceptScore W2013083334C544956773 @default.
• W2013083334 hasConceptScore W2013083334C71924100 @default.
• W2013083334 hasConceptScore W2013083334C77390884 @default.
• W2013083334 hasLocation W20130833341 @default.
• W2013083334 hasOpenAccess W2013083334 @default.
• W2013083334 hasPrimaryLocation W20130833341 @default.
• W2013083334 hasRelatedWork W1977807460 @default.
• W2013083334 hasRelatedWork W1984479611 @default.
• W2013083334 hasRelatedWork W1990866646 @default.
• W2013083334 hasRelatedWork W2027122833 @default.
• W2013083334 hasRelatedWork W2073454514 @default.
• W2013083334 hasRelatedWork W2117496111 @default.
• W2013083334 hasRelatedWork W2541840910 @default.
• W2013083334 hasRelatedWork W2920135595 @default.
• W2013083334 hasRelatedWork W3116133911 @default.
• W2013083334 hasRelatedWork W980827467 @default.

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