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- W2013110007 abstract "Electrostatically actuated micro-mirrors represent one of the most promising technologies for future adaptive optics systems. Due to their relatively high prototyping cost and long fabrication cycle, simulation is one of the key points of their design and optimization. Finite element analysis, behavioral modeling and electronic CAD packages are generally used to study each part of the mirror. This paper shows how the emerging VHDL-AMS language can be used to combine all these simulation tools, and obtain a dynamical simulation of the complete micro-mirror device. This model can then be used as a tool to optimize the characteristics of the mirror and its control electronics to match the specifications of various adaptive optics systems." @default.
- W2013110007 created "2016-06-24" @default.
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- W2013110007 date "2003-02-01" @default.
- W2013110007 modified "2023-10-18" @default.
- W2013110007 title "System level simulation of micro-mirrors for adaptive optics" @default.
- W2013110007 doi "https://doi.org/10.1117/12.458104" @default.
- W2013110007 hasPublicationYear "2003" @default.
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