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- W2013131381 abstract "Etched mirrors for semiconductor lasers are necessary for optoelectronic integrated circuit applications. This letter reports on the use of an inductively coupled plasma (ICP) reactor to create etched mirrors on GaAs/AlGaAs ridge lasers. Etch chemistries consisting of boron trichloride and chlorine were used to achieve both smooth and vertical mirror surfaces. Optical measurements indicate that devices fabricated with ICP etched mirrors are comparable to devices formed by cleaved mirrors." @default.
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- W2013131381 date "1997-09-15" @default.
- W2013131381 modified "2023-09-26" @default.
- W2013131381 title "GaAs/AlGaAs ridge lasers with etched mirrors formed by an inductively coupled plasma reactor" @default.
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- W2013131381 doi "https://doi.org/10.1063/1.119931" @default.
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