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- W2013138940 abstract "In this paper we show that using optical photolithography it’s possible to obtain submicron features for periodic structures using the Talbot effect. To use the Talbot effect without the need of an absolute distance measurement between the mask and the wafer we integrate over several exposures for varying wafer mask distances. Here we discuss the salient features of ‘integrated Talbot lithography’. Particularly, we show that to obtain good contrasts an excellent control of the illumination light is essential; for this we use the MO Exposure Optics (MOEO) developed by SUSS MicroOptics (SMO). Finally we show that 1μm and 0.55μm diameter holes can be made using this technique." @default.
- W2013138940 created "2016-06-24" @default.
- W2013138940 creator A5009754622 @default.
- W2013138940 creator A5010649453 @default.
- W2013138940 creator A5027929936 @default.
- W2013138940 creator A5037267640 @default.
- W2013138940 creator A5043108905 @default.
- W2013138940 creator A5046008432 @default.
- W2013138940 creator A5050032922 @default.
- W2013138940 creator A5058108406 @default.
- W2013138940 creator A5062437018 @default.
- W2013138940 creator A5069017186 @default.
- W2013138940 date "2014-03-07" @default.
- W2013138940 modified "2023-09-27" @default.
- W2013138940 title "Talbot lithography as an alternative for contact lithography for submicron features" @default.
- W2013138940 cites W1995483036 @default.
- W2013138940 cites W1999727418 @default.
- W2013138940 cites W2043527349 @default.
- W2013138940 cites W2055002945 @default.
- W2013138940 cites W2093186187 @default.
- W2013138940 cites W4243293066 @default.
- W2013138940 doi "https://doi.org/10.1117/12.2036896" @default.
- W2013138940 hasPublicationYear "2014" @default.
- W2013138940 type Work @default.
- W2013138940 sameAs 2013138940 @default.
- W2013138940 citedByCount "6" @default.
- W2013138940 countsByYear W20131389402015 @default.
- W2013138940 countsByYear W20131389402016 @default.
- W2013138940 countsByYear W20131389402021 @default.
- W2013138940 countsByYear W20131389402022 @default.
- W2013138940 crossrefType "proceedings-article" @default.
- W2013138940 hasAuthorship W2013138940A5009754622 @default.
- W2013138940 hasAuthorship W2013138940A5010649453 @default.
- W2013138940 hasAuthorship W2013138940A5027929936 @default.
- W2013138940 hasAuthorship W2013138940A5037267640 @default.
- W2013138940 hasAuthorship W2013138940A5043108905 @default.
- W2013138940 hasAuthorship W2013138940A5046008432 @default.
- W2013138940 hasAuthorship W2013138940A5050032922 @default.
- W2013138940 hasAuthorship W2013138940A5058108406 @default.
- W2013138940 hasAuthorship W2013138940A5062437018 @default.
- W2013138940 hasAuthorship W2013138940A5069017186 @default.
- W2013138940 hasConcept C105487726 @default.
- W2013138940 hasConcept C120665830 @default.
- W2013138940 hasConcept C121332964 @default.
- W2013138940 hasConcept C160671074 @default.
- W2013138940 hasConcept C162996421 @default.
- W2013138940 hasConcept C163581340 @default.
- W2013138940 hasConcept C171250308 @default.
- W2013138940 hasConcept C182873914 @default.
- W2013138940 hasConcept C192562407 @default.
- W2013138940 hasConcept C200274948 @default.
- W2013138940 hasConcept C204223013 @default.
- W2013138940 hasConcept C207114421 @default.
- W2013138940 hasConcept C2776698673 @default.
- W2013138940 hasConcept C2779227376 @default.
- W2013138940 hasConcept C41794268 @default.
- W2013138940 hasConcept C49040817 @default.
- W2013138940 hasConcept C53524968 @default.
- W2013138940 hasConcept C70520399 @default.
- W2013138940 hasConcept C94263209 @default.
- W2013138940 hasConceptScore W2013138940C105487726 @default.
- W2013138940 hasConceptScore W2013138940C120665830 @default.
- W2013138940 hasConceptScore W2013138940C121332964 @default.
- W2013138940 hasConceptScore W2013138940C160671074 @default.
- W2013138940 hasConceptScore W2013138940C162996421 @default.
- W2013138940 hasConceptScore W2013138940C163581340 @default.
- W2013138940 hasConceptScore W2013138940C171250308 @default.
- W2013138940 hasConceptScore W2013138940C182873914 @default.
- W2013138940 hasConceptScore W2013138940C192562407 @default.
- W2013138940 hasConceptScore W2013138940C200274948 @default.
- W2013138940 hasConceptScore W2013138940C204223013 @default.
- W2013138940 hasConceptScore W2013138940C207114421 @default.
- W2013138940 hasConceptScore W2013138940C2776698673 @default.
- W2013138940 hasConceptScore W2013138940C2779227376 @default.
- W2013138940 hasConceptScore W2013138940C41794268 @default.
- W2013138940 hasConceptScore W2013138940C49040817 @default.
- W2013138940 hasConceptScore W2013138940C53524968 @default.
- W2013138940 hasConceptScore W2013138940C70520399 @default.
- W2013138940 hasConceptScore W2013138940C94263209 @default.
- W2013138940 hasLocation W20131389401 @default.
- W2013138940 hasOpenAccess W2013138940 @default.
- W2013138940 hasPrimaryLocation W20131389401 @default.
- W2013138940 hasRelatedWork W1552623393 @default.
- W2013138940 hasRelatedWork W1946880670 @default.
- W2013138940 hasRelatedWork W1980495369 @default.
- W2013138940 hasRelatedWork W2033284723 @default.
- W2013138940 hasRelatedWork W2061442019 @default.
- W2013138940 hasRelatedWork W2119359690 @default.
- W2013138940 hasRelatedWork W2122563195 @default.
- W2013138940 hasRelatedWork W3132460757 @default.
- W2013138940 hasRelatedWork W69224963 @default.
- W2013138940 hasRelatedWork W2526528264 @default.
- W2013138940 isParatext "false" @default.
- W2013138940 isRetracted "false" @default.
- W2013138940 magId "2013138940" @default.
- W2013138940 workType "article" @default.