FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2013152010> ?p ?o ?g. }

• W2013152010 endingPage "6909" @default.
• W2013152010 startingPage "6906" @default.
• W2013152010 abstract "In this Letter, we propose and demonstrate a robust process for digital control of high quality SiO2 thin films at room temperature using pulsed plasma-enhanced chemical vapor deposition (PECVD). Plasma activation of the SiCl4 precursor is critical, as atomic layer deposition does not occur under these conditions. Sub-angstrom control over deposition rate was obtained by adjusting the density of SiCl4 present at plasma ignition. The intrinsic refractive index of 1.46 was obtained at rates between 0.8 and 1.6 Å/pulse. No impurities were detected by either X-ray photoelectron spectroscopy (XPS) or Fourier transform infrared (FTIR) in films deposited under optimal conditions." @default.
• W2013152010 created "2016-06-24" @default.
• W2013152010 creator A5007037745 @default.
• W2013152010 creator A5022850992 @default.
• W2013152010 creator A5038166967 @default.
• W2013152010 date "2009-04-08" @default.
• W2013152010 modified "2023-10-01" @default.
• W2013152010 title "Digital Control of SiO₂ Film Deposition at Room Temperature" @default.
• W2013152010 cites W1547482991 @default.
• W2013152010 cites W1967916806 @default.
• W2013152010 cites W1971338170 @default.
• W2013152010 cites W1989565303 @default.
• W2013152010 cites W1992568289 @default.
• W2013152010 cites W1995191254 @default.
• W2013152010 cites W1996998209 @default.
• W2013152010 cites W1998418776 @default.
• W2013152010 cites W2002300630 @default.
• W2013152010 cites W2012294513 @default.
• W2013152010 cites W2013662478 @default.
• W2013152010 cites W2014953135 @default.
• W2013152010 cites W2018448736 @default.
• W2013152010 cites W2025906995 @default.
• W2013152010 cites W2036522397 @default.
• W2013152010 cites W2038476138 @default.
• W2013152010 cites W2044437370 @default.
• W2013152010 cites W2056109892 @default.
• W2013152010 cites W2066548710 @default.
• W2013152010 cites W2066578248 @default.
• W2013152010 cites W2072494311 @default.
• W2013152010 cites W2078338808 @default.
• W2013152010 cites W2080821929 @default.
• W2013152010 cites W2083309742 @default.
• W2013152010 cites W2084581715 @default.
• W2013152010 cites W2086437989 @default.
• W2013152010 cites W2122451616 @default.
• W2013152010 cites W2168859433 @default.
• W2013152010 cites W2335072999 @default.
• W2013152010 cites W2139218273 @default.
• W2013152010 doi "https://doi.org/10.1021/jp902122g" @default.
• W2013152010 hasPublicationYear "2009" @default.
• W2013152010 type Work @default.
• W2013152010 sameAs 2013152010 @default.
• W2013152010 citedByCount "8" @default.
• W2013152010 countsByYear W20131520102012 @default.
• W2013152010 countsByYear W20131520102013 @default.
• W2013152010 countsByYear W20131520102014 @default.
• W2013152010 crossrefType "journal-article" @default.
• W2013152010 hasAuthorship W2013152010A5007037745 @default.
• W2013152010 hasAuthorship W2013152010A5022850992 @default.
• W2013152010 hasAuthorship W2013152010A5038166967 @default.
• W2013152010 hasConcept C113196181 @default.
• W2013152010 hasConcept C121332964 @default.
• W2013152010 hasConcept C127413603 @default.
• W2013152010 hasConcept C151730666 @default.
• W2013152010 hasConcept C160892712 @default.
• W2013152010 hasConcept C171250308 @default.
• W2013152010 hasConcept C175708663 @default.
• W2013152010 hasConcept C178790620 @default.
• W2013152010 hasConcept C185592680 @default.
• W2013152010 hasConcept C19067145 @default.
• W2013152010 hasConcept C192562407 @default.
• W2013152010 hasConcept C2816523 @default.
• W2013152010 hasConcept C38347018 @default.
• W2013152010 hasConcept C42067758 @default.
• W2013152010 hasConcept C42360764 @default.
• W2013152010 hasConcept C43617362 @default.
• W2013152010 hasConcept C49040817 @default.
• W2013152010 hasConcept C57410435 @default.
• W2013152010 hasConcept C62520636 @default.
• W2013152010 hasConcept C64297162 @default.
• W2013152010 hasConcept C69544855 @default.
• W2013152010 hasConcept C71987851 @default.
• W2013152010 hasConcept C82706917 @default.
• W2013152010 hasConcept C86803240 @default.
• W2013152010 hasConceptScore W2013152010C113196181 @default.
• W2013152010 hasConceptScore W2013152010C121332964 @default.
• W2013152010 hasConceptScore W2013152010C127413603 @default.
• W2013152010 hasConceptScore W2013152010C151730666 @default.
• W2013152010 hasConceptScore W2013152010C160892712 @default.
• W2013152010 hasConceptScore W2013152010C171250308 @default.
• W2013152010 hasConceptScore W2013152010C175708663 @default.
• W2013152010 hasConceptScore W2013152010C178790620 @default.
• W2013152010 hasConceptScore W2013152010C185592680 @default.
• W2013152010 hasConceptScore W2013152010C19067145 @default.
• W2013152010 hasConceptScore W2013152010C192562407 @default.
• W2013152010 hasConceptScore W2013152010C2816523 @default.
• W2013152010 hasConceptScore W2013152010C38347018 @default.
• W2013152010 hasConceptScore W2013152010C42067758 @default.
• W2013152010 hasConceptScore W2013152010C42360764 @default.
• W2013152010 hasConceptScore W2013152010C43617362 @default.
• W2013152010 hasConceptScore W2013152010C49040817 @default.
• W2013152010 hasConceptScore W2013152010C57410435 @default.
• W2013152010 hasConceptScore W2013152010C62520636 @default.
• W2013152010 hasConceptScore W2013152010C64297162 @default.
• W2013152010 hasConceptScore W2013152010C69544855 @default.
• W2013152010 hasConceptScore W2013152010C71987851 @default.
• W2013152010 hasConceptScore W2013152010C82706917 @default.
• W2013152010 hasConceptScore W2013152010C86803240 @default.

• next