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- W2013166617 abstract "The high-end semiconductor lithography requirements for overlay and focus control in near-future ITRS nodes are at subnanometer level. This development is extremely challenging for the metrology precision and accuracy, as scaling down to the sub-angstrom level is required for this. On top of the extreme metrology requirements, direct feed-back control of the lithographic steps is needed to meet the future node requirements. Integrated metrology with in-chip measurements, advanced sampling and control-mechanism (using the highest order of correction possible with scanner interface today), are a few of such technologies considered in this publication." @default.
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- W2013166617 date "2013-05-01" @default.
- W2013166617 modified "2023-09-26" @default.
- W2013166617 title "Advanced litho-cluster control via integrated in-chip metrology" @default.
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- W2013166617 doi "https://doi.org/10.1109/asmc.2013.6552760" @default.
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