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• W2013225141 abstract "Abstract Molecular dynamics simulations of the interaction between CF x ( x  = 2, 3) molecules and crystalline as well as amorphous Si 3 N 4 and SiO 2 surfaces using a density-functional based method are reported. The binding energies of various configurations at the crystalline surfaces were calculated. The effect of hydrogen substitution was studied." @default.
• W2013225141 created "2016-06-24" @default.
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• W2013225141 date "2006-01-01" @default.
• W2013225141 modified "2023-10-02" @default.
• W2013225141 title "Molecular dynamics simulations of CFx (x=2,3) molecules at Si3N4 and SiO2 surfaces" @default.
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• W2013225141 doi "https://doi.org/10.1016/j.susc.2005.10.044" @default.
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