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- W2013225171 abstract "A simple end point detection method for dry etching of YBCO layers on uniform substrates is presented. Reflectivity measurements of the etched layer with a HeNe laser beam provides process control and end point detection. A possible application of this method to YBCO layers on substrates with buffer layers is discussed." @default.
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- W2013225171 title "Optical end point detection of etched YBCO films" @default.
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