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- W2013294847 abstract "The hydrogen content of BN films deposited by the ICP plasma method from trimethyl borazine and N2 has been investigated integrally and spatially resolved by elastic recoil detection. Hydrogen contents between 15% and 25% have been found for conditions allowing the formation of c-BN compared with 4%–10% for h-BN conditions (low bias voltages). However, under c-BN conditions hydrogen is concentrated within the sp2 parts of the film, particularly within the nucleation layer. Addition of hydrogen to the gas phase prevents the formation of c-BN and leads to h-BN films with high hydrogen contents. FTIR examination shows that the films do not contain BH and NH bonds; traces of OH and CHx do not add up to the total hydrogen content. Therefore most of the hydrogen must be free, for example incorporated on interstitials." @default.
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- W2013294847 date "1996-07-01" @default.
- W2013294847 modified "2023-09-27" @default.
- W2013294847 title "Hydrogen incorporation during nucleation and growth of c-BN films" @default.
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- W2013294847 doi "https://doi.org/10.1016/0925-9635(95)00472-6" @default.
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