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• W2013325274 abstract "After a short discussion of errors incurred during atomic-force microscopy (AFM), we suggest methods for calibration. We describe specifically designed standards fabricated by metal organic vapor-phase epitaxy (MOVPE) which are utilized as a basis to calibrate the AFM microscope against a mechanical surface profiler and a scanning electron microscope (SEM). An important prerequisite is a well controlled technique to prepare the surface of the sample for AFM. This is demonstrated for the case of InGaAs/InP." @default.
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• W2013325274 date "1998-02-01" @default.
• W2013325274 modified "2023-09-23" @default.
• W2013325274 title "Characterization of quantum structures by atomic-force microscopy" @default.
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• W2013325274 doi "https://doi.org/10.1016/s0921-5107(97)00256-0" @default.
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