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- W2013366102 abstract "The continuous studies for both the outgassing reduction and the sensitivity improvement by applying low outgassing photo acid generator with a various kinds of polymer protection group were discussed in this paper. Further reduction of the outgassing segments from the resist was demonstrated to achieve the total outgassing amount below the detection limit of GC-MS (ca. less than 1E+10 molecules / cm<sup>2</sup>). Loading a large sized acetal group could be successfully reduced the amount of the outgassing segments from polymer below the tool detection limit, which would be acceptable for a high volume manufacturing tool usage. The development properties of PHS based bulky acetal polymers were measured by changing molecular weight. The high dissolution rate contrast was obtained with the bulky acetel protected low molecular weight polymer. A resolution capability study was carried out with micro exposure tool (MET) at LBNL and Albany. The correlation between LWR through CD and DOF was measured by loading various amounts of quencher. The resolution capability of newly developed EUV resist had been successfully improved by modifying both resist polymer matrix and quencher amount optimization. It was possible to obtain 27.7nm lines with MET tool, where LWR value at 35 nm L/S was 3.9 nm with reasonable sensitivity range." @default.
- W2013366102 created "2016-06-24" @default.
- W2013366102 creator A5004301866 @default.
- W2013366102 creator A5013897960 @default.
- W2013366102 creator A5020033465 @default.
- W2013366102 creator A5021711641 @default.
- W2013366102 creator A5087115170 @default.
- W2013366102 date "2007-03-16" @default.
- W2013366102 modified "2023-09-23" @default.
- W2013366102 title "The resist materials study for the outgassing reduction and LWR improvement in EUV lithography" @default.
- W2013366102 cites W2007453746 @default.
- W2013366102 doi "https://doi.org/10.1117/12.711864" @default.
- W2013366102 hasPublicationYear "2007" @default.
- W2013366102 type Work @default.
- W2013366102 sameAs 2013366102 @default.
- W2013366102 citedByCount "4" @default.
- W2013366102 countsByYear W20133661022021 @default.
- W2013366102 crossrefType "proceedings-article" @default.
- W2013366102 hasAuthorship W2013366102A5004301866 @default.
- W2013366102 hasAuthorship W2013366102A5013897960 @default.
- W2013366102 hasAuthorship W2013366102A5020033465 @default.
- W2013366102 hasAuthorship W2013366102A5021711641 @default.
- W2013366102 hasAuthorship W2013366102A5087115170 @default.
- W2013366102 hasConcept C1012414 @default.
- W2013366102 hasConcept C120665830 @default.
- W2013366102 hasConcept C121332964 @default.
- W2013366102 hasConcept C146024833 @default.
- W2013366102 hasConcept C14737013 @default.
- W2013366102 hasConcept C159985019 @default.
- W2013366102 hasConcept C162996421 @default.
- W2013366102 hasConcept C171250308 @default.
- W2013366102 hasConcept C178790620 @default.
- W2013366102 hasConcept C185592680 @default.
- W2013366102 hasConcept C192562407 @default.
- W2013366102 hasConcept C204223013 @default.
- W2013366102 hasConcept C2779227376 @default.
- W2013366102 hasConcept C49040817 @default.
- W2013366102 hasConcept C520434653 @default.
- W2013366102 hasConcept C521977710 @default.
- W2013366102 hasConcept C53524968 @default.
- W2013366102 hasConceptScore W2013366102C1012414 @default.
- W2013366102 hasConceptScore W2013366102C120665830 @default.
- W2013366102 hasConceptScore W2013366102C121332964 @default.
- W2013366102 hasConceptScore W2013366102C146024833 @default.
- W2013366102 hasConceptScore W2013366102C14737013 @default.
- W2013366102 hasConceptScore W2013366102C159985019 @default.
- W2013366102 hasConceptScore W2013366102C162996421 @default.
- W2013366102 hasConceptScore W2013366102C171250308 @default.
- W2013366102 hasConceptScore W2013366102C178790620 @default.
- W2013366102 hasConceptScore W2013366102C185592680 @default.
- W2013366102 hasConceptScore W2013366102C192562407 @default.
- W2013366102 hasConceptScore W2013366102C204223013 @default.
- W2013366102 hasConceptScore W2013366102C2779227376 @default.
- W2013366102 hasConceptScore W2013366102C49040817 @default.
- W2013366102 hasConceptScore W2013366102C520434653 @default.
- W2013366102 hasConceptScore W2013366102C521977710 @default.
- W2013366102 hasConceptScore W2013366102C53524968 @default.
- W2013366102 hasLocation W20133661021 @default.
- W2013366102 hasOpenAccess W2013366102 @default.
- W2013366102 hasPrimaryLocation W20133661021 @default.
- W2013366102 hasRelatedWork W1968505913 @default.
- W2013366102 hasRelatedWork W1969520063 @default.
- W2013366102 hasRelatedWork W1972965417 @default.
- W2013366102 hasRelatedWork W1995361396 @default.
- W2013366102 hasRelatedWork W2013366102 @default.
- W2013366102 hasRelatedWork W2022555088 @default.
- W2013366102 hasRelatedWork W2034439267 @default.
- W2013366102 hasRelatedWork W2042461050 @default.
- W2013366102 hasRelatedWork W2068365482 @default.
- W2013366102 hasRelatedWork W2073753282 @default.
- W2013366102 isParatext "false" @default.
- W2013366102 isRetracted "false" @default.
- W2013366102 magId "2013366102" @default.
- W2013366102 workType "article" @default.