Matches in SemOpenAlex for { <https://semopenalex.org/work/W2013374273> ?p ?o ?g. }
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- W2013374273 endingPage "043011" @default.
- W2013374273 startingPage "043011" @default.
- W2013374273 abstract "Finite element (FE) modeling of electrostatically actuated torsional and flexural-torsional microelectromechanical systems (MEMS) micromirrors is investigated by means of three different tools available in ANSYS FE modeling software, and numerical results are compared with static analytical solutions and existing experimental data. These methods include (a) a sequential coupled electrostatic and structural field tool, (b) a directly coupled electrostatic and structural field tool employing one-dimensional transducer element, and (c) a directly coupled electrostatic and structural field tool utilizing a two- or three-dimensional reduced order model. The torsional micromirror is 1000×250 µm2, and the flexural-torsional micromirror is 100×100 µm2. We present the advantages and disadvantages of these tools for MEMS micromirror modeling. These comparisons allow a selection to be made of the most suitable tool for a given modeling task and assess the accuracy of analytical solutions." @default.
- W2013374273 created "2016-06-24" @default.
- W2013374273 creator A5075452885 @default.
- W2013374273 creator A5081805052 @default.
- W2013374273 date "2007-10-01" @default.
- W2013374273 modified "2023-10-05" @default.
- W2013374273 title "Comparison of three ANSYS finite element tools for analysis of MEMS micromirrors" @default.
- W2013374273 cites W2032035592 @default.
- W2013374273 cites W2088349343 @default.
- W2013374273 cites W2103865190 @default.
- W2013374273 cites W2114998400 @default.
- W2013374273 cites W2125782940 @default.
- W2013374273 cites W2166732668 @default.
- W2013374273 doi "https://doi.org/10.1117/1.2804103" @default.
- W2013374273 hasPublicationYear "2007" @default.
- W2013374273 type Work @default.
- W2013374273 sameAs 2013374273 @default.
- W2013374273 citedByCount "1" @default.
- W2013374273 crossrefType "journal-article" @default.
- W2013374273 hasAuthorship W2013374273A5075452885 @default.
- W2013374273 hasAuthorship W2013374273A5081805052 @default.
- W2013374273 hasConcept C121332964 @default.
- W2013374273 hasConcept C127413603 @default.
- W2013374273 hasConcept C135628077 @default.
- W2013374273 hasConcept C178405089 @default.
- W2013374273 hasConcept C192562407 @default.
- W2013374273 hasConcept C199360897 @default.
- W2013374273 hasConcept C202444582 @default.
- W2013374273 hasConcept C24890656 @default.
- W2013374273 hasConcept C2777904410 @default.
- W2013374273 hasConcept C33923547 @default.
- W2013374273 hasConcept C37977207 @default.
- W2013374273 hasConcept C41008148 @default.
- W2013374273 hasConcept C49040817 @default.
- W2013374273 hasConcept C56318395 @default.
- W2013374273 hasConcept C66938386 @default.
- W2013374273 hasConcept C78519656 @default.
- W2013374273 hasConcept C9652623 @default.
- W2013374273 hasConceptScore W2013374273C121332964 @default.
- W2013374273 hasConceptScore W2013374273C127413603 @default.
- W2013374273 hasConceptScore W2013374273C135628077 @default.
- W2013374273 hasConceptScore W2013374273C178405089 @default.
- W2013374273 hasConceptScore W2013374273C192562407 @default.
- W2013374273 hasConceptScore W2013374273C199360897 @default.
- W2013374273 hasConceptScore W2013374273C202444582 @default.
- W2013374273 hasConceptScore W2013374273C24890656 @default.
- W2013374273 hasConceptScore W2013374273C2777904410 @default.
- W2013374273 hasConceptScore W2013374273C33923547 @default.
- W2013374273 hasConceptScore W2013374273C37977207 @default.
- W2013374273 hasConceptScore W2013374273C41008148 @default.
- W2013374273 hasConceptScore W2013374273C49040817 @default.
- W2013374273 hasConceptScore W2013374273C56318395 @default.
- W2013374273 hasConceptScore W2013374273C66938386 @default.
- W2013374273 hasConceptScore W2013374273C78519656 @default.
- W2013374273 hasConceptScore W2013374273C9652623 @default.
- W2013374273 hasIssue "4" @default.
- W2013374273 hasLocation W20133742731 @default.
- W2013374273 hasOpenAccess W2013374273 @default.
- W2013374273 hasPrimaryLocation W20133742731 @default.
- W2013374273 hasRelatedWork W2199077688 @default.
- W2013374273 hasRelatedWork W2350032752 @default.
- W2013374273 hasRelatedWork W2355625301 @default.
- W2013374273 hasRelatedWork W2362478917 @default.
- W2013374273 hasRelatedWork W2366363060 @default.
- W2013374273 hasRelatedWork W2374325751 @default.
- W2013374273 hasRelatedWork W2381670429 @default.
- W2013374273 hasRelatedWork W2385419644 @default.
- W2013374273 hasRelatedWork W2507567410 @default.
- W2013374273 hasRelatedWork W2899084033 @default.
- W2013374273 hasVolume "6" @default.
- W2013374273 isParatext "false" @default.
- W2013374273 isRetracted "false" @default.
- W2013374273 magId "2013374273" @default.
- W2013374273 workType "article" @default.