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- W2013408042 abstract "A combined spectroscopic method of absorption, actinometry, and relative optical emission intensity is employed to determine the absolute CF2 density, the relative F and H densities, H atom excitation temperature and the electron density in dual-frequency (60/2 MHz) capacitively coupled CHF3/Ar plasmas. The effects of different control parameters, such as high-frequency (HF) power, low-frequency (LF) power, gas pressure, gap length and content of CHF3, on the concentration of radical CF2, F, and H and excitation temperature are discussed, respectively. It is found that the concentration of CF2 is strongly dependent on the HF power, operating pressure and the proportion of CHF3 in feed gas, while it is almost independent of the LF power and the gap length. A higher concentration ratio of F to CF2 could be obtained in dual-frequency discharge case. Finally, the generation and decay mechanisms of CF2 and F were also discussed." @default.
- W2013408042 created "2016-06-24" @default.
- W2013408042 creator A5012593462 @default.
- W2013408042 creator A5013403663 @default.
- W2013408042 creator A5043778112 @default.
- W2013408042 creator A5045121620 @default.
- W2013408042 creator A5050304281 @default.
- W2013408042 creator A5055826220 @default.
- W2013408042 creator A5057117256 @default.
- W2013408042 creator A5065795963 @default.
- W2013408042 creator A5081717248 @default.
- W2013408042 date "2013-11-01" @default.
- W2013408042 modified "2023-09-26" @default.
- W2013408042 title "Spectroscopy diagnostic of dual-frequency capacitively coupled CHF3/Ar plasma" @default.
- W2013408042 cites W1821328325 @default.
- W2013408042 cites W1963711863 @default.
- W2013408042 cites W1963792146 @default.
- W2013408042 cites W1971301992 @default.
- W2013408042 cites W1973492889 @default.
- W2013408042 cites W1974042178 @default.
- W2013408042 cites W1974323733 @default.
- W2013408042 cites W1980038009 @default.
- W2013408042 cites W1986914212 @default.
- W2013408042 cites W1989003705 @default.
- W2013408042 cites W2005289471 @default.
- W2013408042 cites W2007889298 @default.
- W2013408042 cites W2025978629 @default.
- W2013408042 cites W2030425860 @default.
- W2013408042 cites W2031688765 @default.
- W2013408042 cites W2037143906 @default.
- W2013408042 cites W2037960284 @default.
- W2013408042 cites W2041802602 @default.
- W2013408042 cites W2048015077 @default.
- W2013408042 cites W2049887443 @default.
- W2013408042 cites W2054940790 @default.
- W2013408042 cites W2057768941 @default.
- W2013408042 cites W2058355348 @default.
- W2013408042 cites W2060600644 @default.
- W2013408042 cites W2061126661 @default.
- W2013408042 cites W2062799632 @default.
- W2013408042 cites W2063700854 @default.
- W2013408042 cites W2065455126 @default.
- W2013408042 cites W2069262387 @default.
- W2013408042 cites W2075524246 @default.
- W2013408042 cites W2077374023 @default.
- W2013408042 cites W2079756643 @default.
- W2013408042 cites W2080280711 @default.
- W2013408042 cites W2080461130 @default.
- W2013408042 cites W2080766443 @default.
- W2013408042 cites W2081963956 @default.
- W2013408042 cites W2083522909 @default.
- W2013408042 cites W2083646779 @default.
- W2013408042 cites W2085456433 @default.
- W2013408042 cites W2086195766 @default.
- W2013408042 cites W2088506064 @default.
- W2013408042 cites W2089930717 @default.
- W2013408042 cites W2102337165 @default.
- W2013408042 cites W2112552636 @default.
- W2013408042 cites W2123761964 @default.
- W2013408042 cites W2128686018 @default.
- W2013408042 cites W2133534072 @default.
- W2013408042 cites W2136298824 @default.
- W2013408042 cites W2136937054 @default.
- W2013408042 cites W2147092467 @default.
- W2013408042 cites W2162617885 @default.
- W2013408042 cites W2169516997 @default.
- W2013408042 cites W2169963373 @default.
- W2013408042 cites W284635934 @default.
- W2013408042 doi "https://doi.org/10.1063/1.4828397" @default.
- W2013408042 hasPublicationYear "2013" @default.
- W2013408042 type Work @default.
- W2013408042 sameAs 2013408042 @default.
- W2013408042 citedByCount "4" @default.
- W2013408042 countsByYear W20134080422014 @default.
- W2013408042 countsByYear W20134080422015 @default.
- W2013408042 countsByYear W20134080422016 @default.
- W2013408042 crossrefType "journal-article" @default.
- W2013408042 hasAuthorship W2013408042A5012593462 @default.
- W2013408042 hasAuthorship W2013408042A5013403663 @default.
- W2013408042 hasAuthorship W2013408042A5043778112 @default.
- W2013408042 hasAuthorship W2013408042A5045121620 @default.
- W2013408042 hasAuthorship W2013408042A5050304281 @default.
- W2013408042 hasAuthorship W2013408042A5055826220 @default.
- W2013408042 hasAuthorship W2013408042A5057117256 @default.
- W2013408042 hasAuthorship W2013408042A5065795963 @default.
- W2013408042 hasAuthorship W2013408042A5081717248 @default.
- W2013408042 hasConcept C113196181 @default.
- W2013408042 hasConcept C121332964 @default.
- W2013408042 hasConcept C125485243 @default.
- W2013408042 hasConcept C147120987 @default.
- W2013408042 hasConcept C168566512 @default.
- W2013408042 hasConcept C184779094 @default.
- W2013408042 hasConcept C185592680 @default.
- W2013408042 hasConcept C192039680 @default.
- W2013408042 hasConcept C22175881 @default.
- W2013408042 hasConcept C32891209 @default.
- W2013408042 hasConcept C43503373 @default.
- W2013408042 hasConcept C43617362 @default.
- W2013408042 hasConcept C547737533 @default.
- W2013408042 hasConcept C62520636 @default.