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• W2013441346 abstract "The impacts of ruthenium-based metal gate electrodes (Ru,RuOx,RuSiOx) with atomic vapor deposition (AVD) on flatband voltage (VFB) and equivalent oxide thickness (EOT) are demonstrated using a low temperature (&lt;400 °C) process. Increasing thickness of Ru and RuOx exhibits higher VFB, attributed to filling oxygen vacancies [Vo] in high-k gate dielectric with oxygen supplied from AVD metal gate electrodes upon annealing. Ru is efficient to attain a higher work-function and thinner EOT compared to RuOx and RuSiOx. Subsequent physical-vapor-deposition (PVD) TiN capping on AVD metals blocks oxygen out-diffusion, leading to higher VFB than PVD W or AVD TiN capping." @default.
• W2013441346 created "2016-06-24" @default.
• W2013441346 creator A5013356481 @default.
• W2013441346 creator A5022722429 @default.
• W2013441346 creator A5051232628 @default.
• W2013441346 date "2011-02-21" @default.
• W2013441346 modified "2023-09-26" @default.
• W2013441346 title "Ruthenium based metals using atomic vapor deposition for gate electrode applications" @default.
• W2013441346 cites W1497493410 @default.
• W2013441346 cites W1671549006 @default.
• W2013441346 cites W1673770095 @default.
• W2013441346 cites W1969219010 @default.
• W2013441346 cites W1972390874 @default.
• W2013441346 cites W1976206410 @default.
• W2013441346 cites W1978821392 @default.
• W2013441346 cites W1992058263 @default.
• W2013441346 cites W2004011505 @default.
• W2013441346 cites W2029583293 @default.
• W2013441346 cites W2039715103 @default.
• W2013441346 cites W2051514116 @default.
• W2013441346 cites W2073409237 @default.
• W2013441346 cites W2079896837 @default.
• W2013441346 cites W2095074820 @default.
• W2013441346 cites W2156254240 @default.
• W2013441346 doi "https://doi.org/10.1063/1.3559929" @default.
• W2013441346 hasPublicationYear "2011" @default.
• W2013441346 type Work @default.
• W2013441346 sameAs 2013441346 @default.
• W2013441346 citedByCount "6" @default.
• W2013441346 countsByYear W20134413462012 @default.
• W2013441346 countsByYear W20134413462013 @default.
• W2013441346 countsByYear W20134413462014 @default.
• W2013441346 countsByYear W20134413462017 @default.
• W2013441346 crossrefType "journal-article" @default.
• W2013441346 hasAuthorship W2013441346A5013356481 @default.
• W2013441346 hasAuthorship W2013441346A5022722429 @default.
• W2013441346 hasAuthorship W2013441346A5051232628 @default.
• W2013441346 hasConcept C113196181 @default.
• W2013441346 hasConcept C115235246 @default.
• W2013441346 hasConcept C119599485 @default.
• W2013441346 hasConcept C127413603 @default.
• W2013441346 hasConcept C133386390 @default.
• W2013441346 hasConcept C147789679 @default.
• W2013441346 hasConcept C161790260 @default.
• W2013441346 hasConcept C16317505 @default.
• W2013441346 hasConcept C165801399 @default.
• W2013441346 hasConcept C171250308 @default.
• W2013441346 hasConcept C172385210 @default.
• W2013441346 hasConcept C17525397 @default.
• W2013441346 hasConcept C178790620 @default.
• W2013441346 hasConcept C185592680 @default.
• W2013441346 hasConcept C19067145 @default.
• W2013441346 hasConcept C191897082 @default.
• W2013441346 hasConcept C192562407 @default.
• W2013441346 hasConcept C2361726 @default.
• W2013441346 hasConcept C2777129649 @default.
• W2013441346 hasConcept C2777855556 @default.
• W2013441346 hasConcept C2779851234 @default.
• W2013441346 hasConcept C43617362 @default.
• W2013441346 hasConcept C49040817 @default.
• W2013441346 hasConcept C51140833 @default.
• W2013441346 hasConcept C51576277 @default.
• W2013441346 hasConcept C525849907 @default.
• W2013441346 hasConcept C52780932 @default.
• W2013441346 hasConcept C52859227 @default.
• W2013441346 hasConcept C540031477 @default.
• W2013441346 hasConcept C544153396 @default.
• W2013441346 hasConcept C55493867 @default.
• W2013441346 hasConcept C555196967 @default.
• W2013441346 hasConcept C57410435 @default.
• W2013441346 hasConcept C69544855 @default.
• W2013441346 hasConceptScore W2013441346C113196181 @default.
• W2013441346 hasConceptScore W2013441346C115235246 @default.
• W2013441346 hasConceptScore W2013441346C119599485 @default.
• W2013441346 hasConceptScore W2013441346C127413603 @default.
• W2013441346 hasConceptScore W2013441346C133386390 @default.
• W2013441346 hasConceptScore W2013441346C147789679 @default.
• W2013441346 hasConceptScore W2013441346C161790260 @default.
• W2013441346 hasConceptScore W2013441346C16317505 @default.
• W2013441346 hasConceptScore W2013441346C165801399 @default.
• W2013441346 hasConceptScore W2013441346C171250308 @default.
• W2013441346 hasConceptScore W2013441346C172385210 @default.
• W2013441346 hasConceptScore W2013441346C17525397 @default.
• W2013441346 hasConceptScore W2013441346C178790620 @default.
• W2013441346 hasConceptScore W2013441346C185592680 @default.
• W2013441346 hasConceptScore W2013441346C19067145 @default.
• W2013441346 hasConceptScore W2013441346C191897082 @default.
• W2013441346 hasConceptScore W2013441346C192562407 @default.
• W2013441346 hasConceptScore W2013441346C2361726 @default.
• W2013441346 hasConceptScore W2013441346C2777129649 @default.
• W2013441346 hasConceptScore W2013441346C2777855556 @default.
• W2013441346 hasConceptScore W2013441346C2779851234 @default.
• W2013441346 hasConceptScore W2013441346C43617362 @default.
• W2013441346 hasConceptScore W2013441346C49040817 @default.
• W2013441346 hasConceptScore W2013441346C51140833 @default.
• W2013441346 hasConceptScore W2013441346C51576277 @default.
• W2013441346 hasConceptScore W2013441346C525849907 @default.
• W2013441346 hasConceptScore W2013441346C52780932 @default.
• W2013441346 hasConceptScore W2013441346C52859227 @default.
• W2013441346 hasConceptScore W2013441346C540031477 @default.

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