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- W2013452736 endingPage "325" @default.
- W2013452736 startingPage "323" @default.
- W2013452736 abstract "In this work, the microstructure and composition of TiN film, formed by ion beam enhanced deposition (IBED) with 90 keV Xe+ bombardment, and the interface between the TiN film and Si substrate were studied by cross-section analytical transmission electron microscopy. Images of the TiN film and TiN-Si interface are shown. Analysis of microdiffraction patterns and micro-energy-dispersive spectroscopy shows that there are amorphous layers of TiN and Si 80 nm thick at the TiN-Si interface; the TiN amorphous layer is close to the TiN film and the Si layer is near the Si substrate. It is seen from selected area electron diffraction patterns that most of the TiN grains have preferred orientation in a twinned relation with the {111} twin plane. Dark-field images of the TiN film show that the grain size is less than 0.8 nm. The TEM observations of the TiN film can be summarized as follows. (1) The TiN and Si amorphous layers at the TiN-Si interface are formed by Xe+ bombardment. (2) Most of the TiN grains near the TiN-Si interface exist in a twinned relation with the {111} twin plane. (3) The TiN film is a nanometre film; the TiN grain size is less than 0.8 nm. (4) The energy of the xenon ions affects significantly the structure and thickness of the amorphous layers formed between the TiN and Si, and the size and orientation of the TiN grains. (5) Xenon ion bombardment with higher energy results in a preferred orientation and twin relation of TiN grains, and reduces the size of the TiN grains." @default.
- W2013452736 created "2016-06-24" @default.
- W2013452736 creator A5010052962 @default.
- W2013452736 creator A5013702705 @default.
- W2013452736 creator A5038106635 @default.
- W2013452736 creator A5059696161 @default.
- W2013452736 creator A5067345023 @default.
- W2013452736 date "1994-08-01" @default.
- W2013452736 modified "2023-10-16" @default.
- W2013452736 title "Investigation using transmission electron microscopy of the microstructure of TiN film formed by ion beam enhanced deposition under 90 keV Xe+ bombardment on an Si substrate" @default.
- W2013452736 cites W2068830527 @default.
- W2013452736 cites W2075645391 @default.
- W2013452736 doi "https://doi.org/10.1016/0257-8972(94)90022-1" @default.
- W2013452736 hasPublicationYear "1994" @default.
- W2013452736 type Work @default.
- W2013452736 sameAs 2013452736 @default.
- W2013452736 citedByCount "0" @default.
- W2013452736 crossrefType "journal-article" @default.
- W2013452736 hasAuthorship W2013452736A5010052962 @default.
- W2013452736 hasAuthorship W2013452736A5013702705 @default.
- W2013452736 hasAuthorship W2013452736A5038106635 @default.
- W2013452736 hasAuthorship W2013452736A5059696161 @default.
- W2013452736 hasAuthorship W2013452736A5067345023 @default.
- W2013452736 hasConcept C111368507 @default.
- W2013452736 hasConcept C113196181 @default.
- W2013452736 hasConcept C120665830 @default.
- W2013452736 hasConcept C121332964 @default.
- W2013452736 hasConcept C127313418 @default.
- W2013452736 hasConcept C146088050 @default.
- W2013452736 hasConcept C159985019 @default.
- W2013452736 hasConcept C171250308 @default.
- W2013452736 hasConcept C184779094 @default.
- W2013452736 hasConcept C185592680 @default.
- W2013452736 hasConcept C19067145 @default.
- W2013452736 hasConcept C191897082 @default.
- W2013452736 hasConcept C192562407 @default.
- W2013452736 hasConcept C207114421 @default.
- W2013452736 hasConcept C2777289219 @default.
- W2013452736 hasConcept C2779227376 @default.
- W2013452736 hasConcept C43617362 @default.
- W2013452736 hasConcept C525849907 @default.
- W2013452736 hasConcept C548442186 @default.
- W2013452736 hasConcept C56052488 @default.
- W2013452736 hasConcept C77557913 @default.
- W2013452736 hasConcept C8010536 @default.
- W2013452736 hasConcept C87976508 @default.
- W2013452736 hasConceptScore W2013452736C111368507 @default.
- W2013452736 hasConceptScore W2013452736C113196181 @default.
- W2013452736 hasConceptScore W2013452736C120665830 @default.
- W2013452736 hasConceptScore W2013452736C121332964 @default.
- W2013452736 hasConceptScore W2013452736C127313418 @default.
- W2013452736 hasConceptScore W2013452736C146088050 @default.
- W2013452736 hasConceptScore W2013452736C159985019 @default.
- W2013452736 hasConceptScore W2013452736C171250308 @default.
- W2013452736 hasConceptScore W2013452736C184779094 @default.
- W2013452736 hasConceptScore W2013452736C185592680 @default.
- W2013452736 hasConceptScore W2013452736C19067145 @default.
- W2013452736 hasConceptScore W2013452736C191897082 @default.
- W2013452736 hasConceptScore W2013452736C192562407 @default.
- W2013452736 hasConceptScore W2013452736C207114421 @default.
- W2013452736 hasConceptScore W2013452736C2777289219 @default.
- W2013452736 hasConceptScore W2013452736C2779227376 @default.
- W2013452736 hasConceptScore W2013452736C43617362 @default.
- W2013452736 hasConceptScore W2013452736C525849907 @default.
- W2013452736 hasConceptScore W2013452736C548442186 @default.
- W2013452736 hasConceptScore W2013452736C56052488 @default.
- W2013452736 hasConceptScore W2013452736C77557913 @default.
- W2013452736 hasConceptScore W2013452736C8010536 @default.
- W2013452736 hasConceptScore W2013452736C87976508 @default.
- W2013452736 hasIssue "1-3" @default.
- W2013452736 hasLocation W20134527361 @default.
- W2013452736 hasOpenAccess W2013452736 @default.
- W2013452736 hasPrimaryLocation W20134527361 @default.
- W2013452736 hasRelatedWork W1562941104 @default.
- W2013452736 hasRelatedWork W1993938466 @default.
- W2013452736 hasRelatedWork W2014211173 @default.
- W2013452736 hasRelatedWork W2036652866 @default.
- W2013452736 hasRelatedWork W2075974287 @default.
- W2013452736 hasRelatedWork W2322695585 @default.
- W2013452736 hasRelatedWork W2325186504 @default.
- W2013452736 hasRelatedWork W2560398524 @default.
- W2013452736 hasRelatedWork W2605857393 @default.
- W2013452736 hasRelatedWork W2912303238 @default.
- W2013452736 hasVolume "66" @default.
- W2013452736 isParatext "false" @default.
- W2013452736 isRetracted "false" @default.
- W2013452736 magId "2013452736" @default.
- W2013452736 workType "article" @default.