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• W2013472761 abstract "Abstract SiC surfaces were bombarded by H + at 10 keV to total doses ranging from 0.7 to 25 C/cm 2 in both high and ultra high vacuum environments. In the former, carbonaceous deposits were observed optically and with AES and electron microprobe analysis. The thickness of these deposits (determined by surface profilometry) increased up to a dose of 3 C/cm 2 then remained constant. Surface features were observed on these deposits using SEM. In UHV, no deposit was formed, however surface swelling was observed. Surface features were again observed but were qualitatively different than those observed on the carbonaceous deposits. Several possible explanations for these observations are discussed including, in the case of the carbonaceous deposits, a possible phase change from amorphous to ordered occurring in the vicinity of a 3 C/cm 2 dose." @default.
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• W2013472761 date "1976-12-01" @default.
• W2013472761 modified "2023-09-24" @default.
• W2013472761 title "Bombardment of SiC by 10 keV H+: Carbon deposition, surface swelling and changes in surface morphology" @default.
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• W2013472761 doi "https://doi.org/10.1016/0022-3115(76)90354-8" @default.
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