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• W2013558045 abstract "Abstract Plasma-enhanced chemical vapor deposition (PECVD) is among the promising processes to synthesize advanced materials. Carbon films of sp2 with different micro-structures (wall-like/pole-like) are attractive for battery electrodes and have been synthesized from different methane + hydrogen plasmas. To clarify the interaction between plasma and a substrate target surface, an attempt to visualize the intermediate species CH was made in this work. Visible spectra (VIS-spectra) of the spontaneous optical emission from the plasmas were recorded by a multi-channel spectrometer to elucidate reaction mechanisms during the deposition process. The overall spectroscopic emission intensity from the methane-lean plasma was much higher than that from the methane-rich plasma. However, the emission intensity of CH radical in the methane-rich plasma was slightly higher than that in the methane lean one. In addition, two-dimensional spectroscopic images of CH radicals generated in the plasmas were captured using a CCD camera fitted with an optical band-pass filter at 430 nm. It was found that the negative bias voltage was responsible for a turbostratic in the deposited films." @default.
• W2013558045 created "2016-06-24" @default.
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• W2013558045 date "2012-09-01" @default.
• W2013558045 modified "2023-09-23" @default.
• W2013558045 title "Spectroscopic visualization of CH in methane/hydrogen plasmas for synthesis of carbonaceous materials and surface micromorphology" @default.
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• W2013558045 doi "https://doi.org/10.1016/j.microc.2012.04.005" @default.
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