Matches in SemOpenAlex for { <https://semopenalex.org/work/W2013571780> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W2013571780 abstract "An array-based Plasma-Induced Damage (PID) characterization circuit with various antenna structures is proposed for efficient collection of massive PID breakdown statistics. The proposed circuit reduces the stress time and test area by a factor proportional to the number of Devices Under Test (DUTs). Measured Weibull statistics from a 12-24 array implemented in 65nm show that DUTs with plate type antennas have a shorter lifetime compared to their fork type counterparts suggesting greater PID effect during the plasma ashing process." @default.
- W2013571780 created "2016-06-24" @default.
- W2013571780 creator A5003182086 @default.
- W2013571780 creator A5007132032 @default.
- W2013571780 creator A5023812483 @default.
- W2013571780 date "2013-04-01" @default.
- W2013571780 modified "2023-09-22" @default.
- W2013571780 title "An array-based circuit for characterizing latent Plasma-Induced Damage" @default.
- W2013571780 cites W1804634609 @default.
- W2013571780 cites W1975485196 @default.
- W2013571780 cites W2037617117 @default.
- W2013571780 cites W2113230327 @default.
- W2013571780 cites W2118010514 @default.
- W2013571780 cites W2139250887 @default.
- W2013571780 cites W2141844144 @default.
- W2013571780 cites W2563581799 @default.
- W2013571780 doi "https://doi.org/10.1109/irps.2013.6532005" @default.
- W2013571780 hasPublicationYear "2013" @default.
- W2013571780 type Work @default.
- W2013571780 sameAs 2013571780 @default.
- W2013571780 citedByCount "7" @default.
- W2013571780 countsByYear W20135717802014 @default.
- W2013571780 countsByYear W20135717802015 @default.
- W2013571780 countsByYear W20135717802016 @default.
- W2013571780 countsByYear W20135717802017 @default.
- W2013571780 countsByYear W20135717802018 @default.
- W2013571780 crossrefType "proceedings-article" @default.
- W2013571780 hasAuthorship W2013571780A5003182086 @default.
- W2013571780 hasAuthorship W2013571780A5007132032 @default.
- W2013571780 hasAuthorship W2013571780A5023812483 @default.
- W2013571780 hasConcept C105795698 @default.
- W2013571780 hasConcept C121332964 @default.
- W2013571780 hasConcept C127413603 @default.
- W2013571780 hasConcept C133731056 @default.
- W2013571780 hasConcept C138885662 @default.
- W2013571780 hasConcept C173291955 @default.
- W2013571780 hasConcept C17525397 @default.
- W2013571780 hasConcept C192562407 @default.
- W2013571780 hasConcept C197489587 @default.
- W2013571780 hasConcept C21036866 @default.
- W2013571780 hasConcept C21822782 @default.
- W2013571780 hasConcept C24326235 @default.
- W2013571780 hasConcept C33923547 @default.
- W2013571780 hasConcept C41008148 @default.
- W2013571780 hasConcept C41895202 @default.
- W2013571780 hasConcept C47116090 @default.
- W2013571780 hasConcept C536315585 @default.
- W2013571780 hasConcept C62520636 @default.
- W2013571780 hasConcept C76155785 @default.
- W2013571780 hasConcept C82706917 @default.
- W2013571780 hasConceptScore W2013571780C105795698 @default.
- W2013571780 hasConceptScore W2013571780C121332964 @default.
- W2013571780 hasConceptScore W2013571780C127413603 @default.
- W2013571780 hasConceptScore W2013571780C133731056 @default.
- W2013571780 hasConceptScore W2013571780C138885662 @default.
- W2013571780 hasConceptScore W2013571780C173291955 @default.
- W2013571780 hasConceptScore W2013571780C17525397 @default.
- W2013571780 hasConceptScore W2013571780C192562407 @default.
- W2013571780 hasConceptScore W2013571780C197489587 @default.
- W2013571780 hasConceptScore W2013571780C21036866 @default.
- W2013571780 hasConceptScore W2013571780C21822782 @default.
- W2013571780 hasConceptScore W2013571780C24326235 @default.
- W2013571780 hasConceptScore W2013571780C33923547 @default.
- W2013571780 hasConceptScore W2013571780C41008148 @default.
- W2013571780 hasConceptScore W2013571780C41895202 @default.
- W2013571780 hasConceptScore W2013571780C47116090 @default.
- W2013571780 hasConceptScore W2013571780C536315585 @default.
- W2013571780 hasConceptScore W2013571780C62520636 @default.
- W2013571780 hasConceptScore W2013571780C76155785 @default.
- W2013571780 hasConceptScore W2013571780C82706917 @default.
- W2013571780 hasLocation W20135717801 @default.
- W2013571780 hasOpenAccess W2013571780 @default.
- W2013571780 hasPrimaryLocation W20135717801 @default.
- W2013571780 hasRelatedWork W1483834507 @default.
- W2013571780 hasRelatedWork W1493677118 @default.
- W2013571780 hasRelatedWork W1558737602 @default.
- W2013571780 hasRelatedWork W1990191301 @default.
- W2013571780 hasRelatedWork W2003226853 @default.
- W2013571780 hasRelatedWork W2056626852 @default.
- W2013571780 hasRelatedWork W2056677812 @default.
- W2013571780 hasRelatedWork W2066460268 @default.
- W2013571780 hasRelatedWork W2096222423 @default.
- W2013571780 hasRelatedWork W2121143737 @default.
- W2013571780 hasRelatedWork W2141047572 @default.
- W2013571780 hasRelatedWork W2144584846 @default.
- W2013571780 hasRelatedWork W2150772895 @default.
- W2013571780 hasRelatedWork W2159486389 @default.
- W2013571780 hasRelatedWork W2159944579 @default.
- W2013571780 hasRelatedWork W2378379127 @default.
- W2013571780 hasRelatedWork W2569710359 @default.
- W2013571780 hasRelatedWork W2984560599 @default.
- W2013571780 hasRelatedWork W3152147373 @default.
- W2013571780 hasRelatedWork W2821774083 @default.
- W2013571780 isParatext "false" @default.
- W2013571780 isRetracted "false" @default.
- W2013571780 magId "2013571780" @default.
- W2013571780 workType "article" @default.