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- W2013608469 abstract "Abstract The preparation of gallium nitride films by deposition from the vapour phase (MOCVD, MBE) may suffer from an occurrence of multiple orientations and a mixture of the wurtzite (2H) and the sphalerite (3C) polytype if nucleation and deposition conditions are not optimized. We use X-ray texture diffractometry with dedicated beam optics and various scanning techniques to check for the presence of unwanted orientations and phases in a quick and semi-quantitative manner. A variety of GaN films showing multiple orientations were analyzed with respect to the nature of polycrystalline growth. These films were deposited by MOCVD on sapphire substrates. From X-ray polefigures and approximations of the texture by model components we found that the 2H and 3C orientations in these films are interrelated via stacking faults on {0001} and {111} planes, respectively. To obtain a single crystalline film orientation, a suppression of the formation of stacking faults is required. This has been achieved under optimized MOCVD conditions. As is evidennt by X-ray diffractometry, these films are single crystalline, phase pure 2H GaN films with small mosaicity spreads." @default.
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- W2013608469 date "1999-05-01" @default.
- W2013608469 modified "2023-10-14" @default.
- W2013608469 title "X-ray analysis of the texture of heteroepitaxial gallium nitride films" @default.
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- W2013608469 doi "https://doi.org/10.1016/s0921-5107(98)00391-2" @default.
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