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- W2013612081 abstract "A new type of test sample for the determination of lateral resolution in surface analysis is presented. The certified reference material BAM-L002 ‘Nanoscale strip pattern for length calibration and testing of lateral resolution’ is an embedded cross-section of epitaxially grown layers of AlxGa1−xAs and InxGa1−xAs on GaAs substrate. The surface of the sample provides a flat pattern with strip widths of 0.4–500 nm. The combination of gratings, isolated narrow strips and sharp edges of wide strips offers improved possibilities for the calibration of a length scale, the determination of lateral resolution and the optimization of instrument settings. The feasibility of the reference material for an analysis of lateral resolution is demonstrated for SIMS. Copyright © 2004 John Wiley & Sons, Ltd." @default.
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- W2013612081 date "2004-10-01" @default.
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- W2013612081 title "BAM-L002-a new type of certified reference material for length calibration and testing of lateral resolution in the nanometre range" @default.
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- W2013612081 doi "https://doi.org/10.1002/sia.1936" @default.
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