Matches in SemOpenAlex for { <https://semopenalex.org/work/W2013711259> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W2013711259 abstract "A new fabrication method for locally doped silicon resonators is demonstrated within an epitaxial polysilicon encapsulation process (consistent with the established low cost, high yield, high volume manufacturing at SiTime Corporation). Using a cavity etch followed by a selective epitaxial silicon refill with in situ degenerate doping, distinct locally doped regions on a 40-μm thick silicon device layer were obtained. Resonators from two different families were characterized for a couple of doping levels and show that temperature sensitivity can be suppressed. This capability removes one of the last remaining disadvantages of silicon as a resonator material, relative to quartz, and should directly enable improvements in the performance, power consumption, and cost of MEMS-based timing products." @default.
- W2013711259 created "2016-06-24" @default.
- W2013711259 creator A5011946331 @default.
- W2013711259 creator A5014932873 @default.
- W2013711259 creator A5025160903 @default.
- W2013711259 creator A5031124366 @default.
- W2013711259 creator A5045911536 @default.
- W2013711259 creator A5064737582 @default.
- W2013711259 creator A5065967592 @default.
- W2013711259 creator A5084399200 @default.
- W2013711259 date "2013-06-01" @default.
- W2013711259 modified "2023-09-23" @default.
- W2013711259 title "Localized, degenerately doped epitaxial silicon for temperature compensation of resonant MEMS systems" @default.
- W2013711259 cites W1853892554 @default.
- W2013711259 cites W1974946888 @default.
- W2013711259 cites W1979931440 @default.
- W2013711259 cites W1996638985 @default.
- W2013711259 cites W2015477756 @default.
- W2013711259 cites W2016188245 @default.
- W2013711259 cites W2119404297 @default.
- W2013711259 cites W2123499220 @default.
- W2013711259 cites W2130512184 @default.
- W2013711259 cites W2134984908 @default.
- W2013711259 cites W249875913 @default.
- W2013711259 doi "https://doi.org/10.1109/transducers.2013.6627294" @default.
- W2013711259 hasPublicationYear "2013" @default.
- W2013711259 type Work @default.
- W2013711259 sameAs 2013711259 @default.
- W2013711259 citedByCount "14" @default.
- W2013711259 countsByYear W20137112592013 @default.
- W2013711259 countsByYear W20137112592014 @default.
- W2013711259 countsByYear W20137112592015 @default.
- W2013711259 countsByYear W20137112592017 @default.
- W2013711259 countsByYear W20137112592018 @default.
- W2013711259 countsByYear W20137112592019 @default.
- W2013711259 countsByYear W20137112592020 @default.
- W2013711259 countsByYear W20137112592022 @default.
- W2013711259 crossrefType "proceedings-article" @default.
- W2013711259 hasAuthorship W2013711259A5011946331 @default.
- W2013711259 hasAuthorship W2013711259A5014932873 @default.
- W2013711259 hasAuthorship W2013711259A5025160903 @default.
- W2013711259 hasAuthorship W2013711259A5031124366 @default.
- W2013711259 hasAuthorship W2013711259A5045911536 @default.
- W2013711259 hasAuthorship W2013711259A5064737582 @default.
- W2013711259 hasAuthorship W2013711259A5065967592 @default.
- W2013711259 hasAuthorship W2013711259A5084399200 @default.
- W2013711259 hasConcept C110738630 @default.
- W2013711259 hasConcept C11171543 @default.
- W2013711259 hasConcept C121332964 @default.
- W2013711259 hasConcept C15744967 @default.
- W2013711259 hasConcept C171250308 @default.
- W2013711259 hasConcept C192562407 @default.
- W2013711259 hasConcept C2779227376 @default.
- W2013711259 hasConcept C2780023022 @default.
- W2013711259 hasConcept C37977207 @default.
- W2013711259 hasConcept C49040817 @default.
- W2013711259 hasConcept C544956773 @default.
- W2013711259 hasConcept C57863236 @default.
- W2013711259 hasConcept C62520636 @default.
- W2013711259 hasConcept C72293138 @default.
- W2013711259 hasConceptScore W2013711259C110738630 @default.
- W2013711259 hasConceptScore W2013711259C11171543 @default.
- W2013711259 hasConceptScore W2013711259C121332964 @default.
- W2013711259 hasConceptScore W2013711259C15744967 @default.
- W2013711259 hasConceptScore W2013711259C171250308 @default.
- W2013711259 hasConceptScore W2013711259C192562407 @default.
- W2013711259 hasConceptScore W2013711259C2779227376 @default.
- W2013711259 hasConceptScore W2013711259C2780023022 @default.
- W2013711259 hasConceptScore W2013711259C37977207 @default.
- W2013711259 hasConceptScore W2013711259C49040817 @default.
- W2013711259 hasConceptScore W2013711259C544956773 @default.
- W2013711259 hasConceptScore W2013711259C57863236 @default.
- W2013711259 hasConceptScore W2013711259C62520636 @default.
- W2013711259 hasConceptScore W2013711259C72293138 @default.
- W2013711259 hasLocation W20137112591 @default.
- W2013711259 hasOpenAccess W2013711259 @default.
- W2013711259 hasPrimaryLocation W20137112591 @default.
- W2013711259 hasRelatedWork W1965789664 @default.
- W2013711259 hasRelatedWork W2003658924 @default.
- W2013711259 hasRelatedWork W2023103230 @default.
- W2013711259 hasRelatedWork W2041481498 @default.
- W2013711259 hasRelatedWork W2053758144 @default.
- W2013711259 hasRelatedWork W2098206083 @default.
- W2013711259 hasRelatedWork W2105103762 @default.
- W2013711259 hasRelatedWork W2114356002 @default.
- W2013711259 hasRelatedWork W3045739576 @default.
- W2013711259 hasRelatedWork W4247366453 @default.
- W2013711259 isParatext "false" @default.
- W2013711259 isRetracted "false" @default.
- W2013711259 magId "2013711259" @default.
- W2013711259 workType "article" @default.