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• W2013726581 endingPage "840" @default.
• W2013726581 startingPage "832" @default.
• W2013726581 abstract "This paper presents design, fabrication and calibration results for a novel 2-DOF capacitive force sensor capable of resolving forces up to 490 µN with a resolution of 0.01 µN in x, and up to 900 µN with a resolution of 0.24 µN in y. A simple fabrication process using deep reactive ion etching (DRIE) on silicon-on-insulator (SOI) wafers forms the 3D high aspect ratio structure. A transverse mode comb drive movement is used to greatly improve device sensitivity. Among other advantages of the developed process is a dice-free release of wafer structures, allowing fragile structures to be individually packaged. Notching or footing effects and bowing effects are well-known problems in DRIE on SOI wafers. Techniques to overcome notching and bowing effects using a PlasmaTherm SLR-770 etcher are presented that do not require hardware modifications. The application of the force sensor is for providing real-time force feedback during individual cell manipulation tasks." @default.
• W2013726581 created "2016-06-24" @default.
• W2013726581 creator A5003142435 @default.
• W2013726581 creator A5006427311 @default.
• W2013726581 creator A5027259931 @default.
• W2013726581 creator A5077878309 @default.
• W2013726581 date "2002-10-03" @default.
• W2013726581 modified "2023-10-03" @default.
• W2013726581 title "A bulk microfabricated multi-axis capacitive cellular force sensor using transverse comb drives" @default.
• W2013726581 cites W1975705189 @default.
• W2013726581 cites W1981574050 @default.
• W2013726581 cites W1994215475 @default.
• W2013726581 cites W2041781722 @default.
• W2013726581 cites W2051188571 @default.
• W2013726581 cites W2054377138 @default.
• W2013726581 cites W2071484764 @default.
• W2013726581 cites W2074853258 @default.
• W2013726581 cites W2082840053 @default.
• W2013726581 cites W2094652511 @default.
• W2013726581 cites W2097036133 @default.
• W2013726581 cites W2100916163 @default.
• W2013726581 cites W2104954201 @default.
• W2013726581 cites W2112262368 @default.
• W2013726581 cites W2115856403 @default.
• W2013726581 cites W2126628723 @default.
• W2013726581 cites W2144025468 @default.
• W2013726581 cites W2144876431 @default.
• W2013726581 cites W2153646540 @default.
• W2013726581 cites W2164679795 @default.
• W2013726581 doi "https://doi.org/10.1088/0960-1317/12/6/314" @default.
• W2013726581 hasPublicationYear "2002" @default.
• W2013726581 type Work @default.
• W2013726581 sameAs 2013726581 @default.
• W2013726581 citedByCount "160" @default.
• W2013726581 countsByYear W20137265812012 @default.
• W2013726581 countsByYear W20137265812013 @default.
• W2013726581 countsByYear W20137265812014 @default.
• W2013726581 countsByYear W20137265812015 @default.
• W2013726581 countsByYear W20137265812016 @default.
• W2013726581 countsByYear W20137265812017 @default.
• W2013726581 countsByYear W20137265812018 @default.
• W2013726581 countsByYear W20137265812019 @default.
• W2013726581 countsByYear W20137265812020 @default.
• W2013726581 countsByYear W20137265812021 @default.
• W2013726581 countsByYear W20137265812022 @default.
• W2013726581 countsByYear W20137265812023 @default.
• W2013726581 crossrefType "journal-article" @default.
• W2013726581 hasAuthorship W2013726581A5003142435 @default.
• W2013726581 hasAuthorship W2013726581A5006427311 @default.
• W2013726581 hasAuthorship W2013726581A5027259931 @default.
• W2013726581 hasAuthorship W2013726581A5077878309 @default.
• W2013726581 hasConcept C100460472 @default.
• W2013726581 hasConcept C119599485 @default.
• W2013726581 hasConcept C124634506 @default.
• W2013726581 hasConcept C127413603 @default.
• W2013726581 hasConcept C130472188 @default.
• W2013726581 hasConcept C136525101 @default.
• W2013726581 hasConcept C142724271 @default.
• W2013726581 hasConcept C154954056 @default.
• W2013726581 hasConcept C155840801 @default.
• W2013726581 hasConcept C160671074 @default.
• W2013726581 hasConcept C169961218 @default.
• W2013726581 hasConcept C171250308 @default.
• W2013726581 hasConcept C191897082 @default.
• W2013726581 hasConcept C192562407 @default.
• W2013726581 hasConcept C204787440 @default.
• W2013726581 hasConcept C206755178 @default.
• W2013726581 hasConcept C24326235 @default.
• W2013726581 hasConcept C2779227376 @default.
• W2013726581 hasConcept C37977207 @default.
• W2013726581 hasConcept C49040817 @default.
• W2013726581 hasConcept C53143962 @default.
• W2013726581 hasConcept C544956773 @default.
• W2013726581 hasConcept C66938386 @default.
• W2013726581 hasConcept C71924100 @default.
• W2013726581 hasConceptScore W2013726581C100460472 @default.
• W2013726581 hasConceptScore W2013726581C119599485 @default.
• W2013726581 hasConceptScore W2013726581C124634506 @default.
• W2013726581 hasConceptScore W2013726581C127413603 @default.
• W2013726581 hasConceptScore W2013726581C130472188 @default.
• W2013726581 hasConceptScore W2013726581C136525101 @default.
• W2013726581 hasConceptScore W2013726581C142724271 @default.
• W2013726581 hasConceptScore W2013726581C154954056 @default.
• W2013726581 hasConceptScore W2013726581C155840801 @default.
• W2013726581 hasConceptScore W2013726581C160671074 @default.
• W2013726581 hasConceptScore W2013726581C169961218 @default.
• W2013726581 hasConceptScore W2013726581C171250308 @default.
• W2013726581 hasConceptScore W2013726581C191897082 @default.
• W2013726581 hasConceptScore W2013726581C192562407 @default.
• W2013726581 hasConceptScore W2013726581C204787440 @default.
• W2013726581 hasConceptScore W2013726581C206755178 @default.
• W2013726581 hasConceptScore W2013726581C24326235 @default.
• W2013726581 hasConceptScore W2013726581C2779227376 @default.
• W2013726581 hasConceptScore W2013726581C37977207 @default.
• W2013726581 hasConceptScore W2013726581C49040817 @default.
• W2013726581 hasConceptScore W2013726581C53143962 @default.
• W2013726581 hasConceptScore W2013726581C544956773 @default.
• W2013726581 hasConceptScore W2013726581C66938386 @default.

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