Matches in SemOpenAlex for { <https://semopenalex.org/work/W2013738874> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W2013738874 endingPage "4482" @default.
- W2013738874 startingPage "4478" @default.
- W2013738874 abstract "In this paper, the influence of the sputtering technology (reactive gas partial pressure, magnetic field intensity) on the power supply parameters has been investigated. The reactive sputtering of aluminium target in Ar + O2 atmosphere has been used as an example. The experiments have shown that the formation of the Al2O3 layers can be observed by the parameter of the power supply. It allowed estimating the point at which the sputtered material surface was poisoned by the reactive compound i.e. distinguishing magnetron sputtering modes." @default.
- W2013738874 created "2016-06-24" @default.
- W2013738874 creator A5076454981 @default.
- W2013738874 creator A5077051000 @default.
- W2013738874 creator A5077724970 @default.
- W2013738874 creator A5080938052 @default.
- W2013738874 date "2008-05-01" @default.
- W2013738874 modified "2023-09-27" @default.
- W2013738874 title "Magnetron sputtering process control by medium-frequency power supply parameter" @default.
- W2013738874 cites W1971907963 @default.
- W2013738874 cites W1980929018 @default.
- W2013738874 cites W2053914167 @default.
- W2013738874 cites W2085774152 @default.
- W2013738874 cites W2035789712 @default.
- W2013738874 doi "https://doi.org/10.1016/j.tsf.2007.05.077" @default.
- W2013738874 hasPublicationYear "2008" @default.
- W2013738874 type Work @default.
- W2013738874 sameAs 2013738874 @default.
- W2013738874 citedByCount "81" @default.
- W2013738874 countsByYear W20137388742012 @default.
- W2013738874 countsByYear W20137388742013 @default.
- W2013738874 countsByYear W20137388742014 @default.
- W2013738874 countsByYear W20137388742015 @default.
- W2013738874 countsByYear W20137388742016 @default.
- W2013738874 countsByYear W20137388742017 @default.
- W2013738874 countsByYear W20137388742018 @default.
- W2013738874 countsByYear W20137388742019 @default.
- W2013738874 countsByYear W20137388742020 @default.
- W2013738874 countsByYear W20137388742021 @default.
- W2013738874 countsByYear W20137388742022 @default.
- W2013738874 countsByYear W20137388742023 @default.
- W2013738874 crossrefType "journal-article" @default.
- W2013738874 hasAuthorship W2013738874A5076454981 @default.
- W2013738874 hasAuthorship W2013738874A5077051000 @default.
- W2013738874 hasAuthorship W2013738874A5077724970 @default.
- W2013738874 hasAuthorship W2013738874A5080938052 @default.
- W2013738874 hasConcept C107872376 @default.
- W2013738874 hasConcept C113196181 @default.
- W2013738874 hasConcept C121332964 @default.
- W2013738874 hasConcept C123408415 @default.
- W2013738874 hasConcept C163258240 @default.
- W2013738874 hasConcept C171250308 @default.
- W2013738874 hasConcept C178790620 @default.
- W2013738874 hasConcept C185592680 @default.
- W2013738874 hasConcept C19067145 @default.
- W2013738874 hasConcept C191897082 @default.
- W2013738874 hasConcept C192562407 @default.
- W2013738874 hasConcept C22423302 @default.
- W2013738874 hasConcept C49040817 @default.
- W2013738874 hasConcept C513153333 @default.
- W2013738874 hasConcept C540031477 @default.
- W2013738874 hasConcept C61427134 @default.
- W2013738874 hasConcept C68463220 @default.
- W2013738874 hasConcept C97355855 @default.
- W2013738874 hasConcept C97892325 @default.
- W2013738874 hasConceptScore W2013738874C107872376 @default.
- W2013738874 hasConceptScore W2013738874C113196181 @default.
- W2013738874 hasConceptScore W2013738874C121332964 @default.
- W2013738874 hasConceptScore W2013738874C123408415 @default.
- W2013738874 hasConceptScore W2013738874C163258240 @default.
- W2013738874 hasConceptScore W2013738874C171250308 @default.
- W2013738874 hasConceptScore W2013738874C178790620 @default.
- W2013738874 hasConceptScore W2013738874C185592680 @default.
- W2013738874 hasConceptScore W2013738874C19067145 @default.
- W2013738874 hasConceptScore W2013738874C191897082 @default.
- W2013738874 hasConceptScore W2013738874C192562407 @default.
- W2013738874 hasConceptScore W2013738874C22423302 @default.
- W2013738874 hasConceptScore W2013738874C49040817 @default.
- W2013738874 hasConceptScore W2013738874C513153333 @default.
- W2013738874 hasConceptScore W2013738874C540031477 @default.
- W2013738874 hasConceptScore W2013738874C61427134 @default.
- W2013738874 hasConceptScore W2013738874C68463220 @default.
- W2013738874 hasConceptScore W2013738874C97355855 @default.
- W2013738874 hasConceptScore W2013738874C97892325 @default.
- W2013738874 hasIssue "14" @default.
- W2013738874 hasLocation W20137388741 @default.
- W2013738874 hasOpenAccess W2013738874 @default.
- W2013738874 hasPrimaryLocation W20137388741 @default.
- W2013738874 hasRelatedWork W1973833352 @default.
- W2013738874 hasRelatedWork W1988779981 @default.
- W2013738874 hasRelatedWork W2022760403 @default.
- W2013738874 hasRelatedWork W2062459093 @default.
- W2013738874 hasRelatedWork W2080532757 @default.
- W2013738874 hasRelatedWork W2082909952 @default.
- W2013738874 hasRelatedWork W2387657166 @default.
- W2013738874 hasRelatedWork W3199181436 @default.
- W2013738874 hasRelatedWork W2245424316 @default.
- W2013738874 hasRelatedWork W2469621223 @default.
- W2013738874 hasVolume "516" @default.
- W2013738874 isParatext "false" @default.
- W2013738874 isRetracted "false" @default.
- W2013738874 magId "2013738874" @default.
- W2013738874 workType "article" @default.