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• W2013791208 endingPage "064905" @default.
• W2013791208 startingPage "064905" @default.
• W2013791208 abstract "Highly c-axis oriented ZnO thin films have been deposited on silicon substrates by planar rf magnetron sputtering under varying pressure (10–50 mTorr) and oxygen percentage (50–100%) in the reactive gas (Ar + O2) mixture. The as-grown films were found to be stressed over a wide range from −1 × 1011 to −2 × 108 dyne/cm2 that in turn depends strongly on the processing conditions, and the film becomes stress free at a unique combination of sputtering pressure and reactive gas composition. Raman spectroscopy and photoluminescence (PL) analyses identified the origin of stress as lattice distortion due to defects introduced in the ZnO thin film. FTIR study reveals that Zn-O bond becomes stronger with the increase in oxygen fraction in the reactive gas mixture. The lattice distortion or stress depends on the type of defects introduced during deposition. PL spectra show the formation of a shoulder in band emission with an increase in the processing pressure and are related to the presence of stress. The ratio of band emission to defect emission decreases with the increase in oxygen percentage from 50 to 100%. The studies show a correlation of stress with the structural, vibrational, and photoluminescence properties of the ZnO thin film. The systematic study of the stress will help in the fabrication of efficient devices based on ZnO film." @default.
• W2013791208 created "2016-06-24" @default.
• W2013791208 creator A5003129802 @default.
• W2013791208 creator A5030770813 @default.
• W2013791208 creator A5036640370 @default.
• W2013791208 creator A5062758747 @default.
• W2013791208 creator A5069179193 @default.
• W2013791208 date "2011-03-15" @default.
• W2013791208 modified "2023-10-16" @default.
• W2013791208 title "Origin of stress in radio frequency magnetron sputtered zinc oxide thin films" @default.
• W2013791208 cites W1967652077 @default.
• W2013791208 cites W1968208275 @default.
• W2013791208 cites W1976250511 @default.
• W2013791208 cites W1981820835 @default.
• W2013791208 cites W1993383745 @default.
• W2013791208 cites W1997643302 @default.
• W2013791208 cites W2006974968 @default.
• W2013791208 cites W2012563589 @default.
• W2013791208 cites W2019573328 @default.
• W2013791208 cites W2022338955 @default.
• W2013791208 cites W2034102613 @default.
• W2013791208 cites W2040179900 @default.
• W2013791208 cites W2044768061 @default.
• W2013791208 cites W2052668636 @default.
• W2013791208 cites W2060009161 @default.
• W2013791208 cites W2066677295 @default.
• W2013791208 cites W2069435306 @default.
• W2013791208 cites W2071098598 @default.
• W2013791208 cites W2071794066 @default.
• W2013791208 cites W2073363003 @default.
• W2013791208 cites W2075718071 @default.
• W2013791208 cites W2076615568 @default.
• W2013791208 cites W2086477600 @default.
• W2013791208 cites W2088060382 @default.
• W2013791208 cites W2094454509 @default.
• W2013791208 cites W2097819962 @default.
• W2013791208 cites W2131909665 @default.
• W2013791208 cites W4240692860 @default.
• W2013791208 doi "https://doi.org/10.1063/1.3552928" @default.
• W2013791208 hasPublicationYear "2011" @default.
• W2013791208 type Work @default.
• W2013791208 sameAs 2013791208 @default.
• W2013791208 citedByCount "53" @default.
• W2013791208 countsByYear W20137912082012 @default.
• W2013791208 countsByYear W20137912082013 @default.
• W2013791208 countsByYear W20137912082014 @default.
• W2013791208 countsByYear W20137912082015 @default.
• W2013791208 countsByYear W20137912082016 @default.
• W2013791208 countsByYear W20137912082017 @default.
• W2013791208 countsByYear W20137912082018 @default.
• W2013791208 countsByYear W20137912082019 @default.
• W2013791208 countsByYear W20137912082020 @default.
• W2013791208 countsByYear W20137912082021 @default.
• W2013791208 countsByYear W20137912082023 @default.
• W2013791208 crossrefType "journal-article" @default.
• W2013791208 hasAuthorship W2013791208A5003129802 @default.
• W2013791208 hasAuthorship W2013791208A5030770813 @default.
• W2013791208 hasAuthorship W2013791208A5036640370 @default.
• W2013791208 hasAuthorship W2013791208A5062758747 @default.
• W2013791208 hasAuthorship W2013791208A5069179193 @default.
• W2013791208 hasBestOaLocation W20137912082 @default.
• W2013791208 hasConcept C113196181 @default.
• W2013791208 hasConcept C120665830 @default.
• W2013791208 hasConcept C121332964 @default.
• W2013791208 hasConcept C138885662 @default.
• W2013791208 hasConcept C171250308 @default.
• W2013791208 hasConcept C185592680 @default.
• W2013791208 hasConcept C19067145 @default.
• W2013791208 hasConcept C192562407 @default.
• W2013791208 hasConcept C21036866 @default.
• W2013791208 hasConcept C22423302 @default.
• W2013791208 hasConcept C40003534 @default.
• W2013791208 hasConcept C41895202 @default.
• W2013791208 hasConcept C43617362 @default.
• W2013791208 hasConcept C49040817 @default.
• W2013791208 hasConcept C544956773 @default.
• W2013791208 hasConcept C61427134 @default.
• W2013791208 hasConcept C85080765 @default.
• W2013791208 hasConceptScore W2013791208C113196181 @default.
• W2013791208 hasConceptScore W2013791208C120665830 @default.
• W2013791208 hasConceptScore W2013791208C121332964 @default.
• W2013791208 hasConceptScore W2013791208C138885662 @default.
• W2013791208 hasConceptScore W2013791208C171250308 @default.
• W2013791208 hasConceptScore W2013791208C185592680 @default.
• W2013791208 hasConceptScore W2013791208C19067145 @default.
• W2013791208 hasConceptScore W2013791208C192562407 @default.
• W2013791208 hasConceptScore W2013791208C21036866 @default.
• W2013791208 hasConceptScore W2013791208C22423302 @default.
• W2013791208 hasConceptScore W2013791208C40003534 @default.
• W2013791208 hasConceptScore W2013791208C41895202 @default.
• W2013791208 hasConceptScore W2013791208C43617362 @default.
• W2013791208 hasConceptScore W2013791208C49040817 @default.
• W2013791208 hasConceptScore W2013791208C544956773 @default.
• W2013791208 hasConceptScore W2013791208C61427134 @default.
• W2013791208 hasConceptScore W2013791208C85080765 @default.
• W2013791208 hasIssue "6" @default.
• W2013791208 hasLocation W20137912081 @default.
• W2013791208 hasLocation W20137912082 @default.

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